JPS61156237U - - Google Patents

Info

Publication number
JPS61156237U
JPS61156237U JP3922085U JP3922085U JPS61156237U JP S61156237 U JPS61156237 U JP S61156237U JP 3922085 U JP3922085 U JP 3922085U JP 3922085 U JP3922085 U JP 3922085U JP S61156237 U JPS61156237 U JP S61156237U
Authority
JP
Japan
Prior art keywords
section
jig
semiconductor substrate
utility
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3922085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3922085U priority Critical patent/JPS61156237U/ja
Publication of JPS61156237U publication Critical patent/JPS61156237U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP3922085U 1985-03-19 1985-03-19 Pending JPS61156237U (id)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3922085U JPS61156237U (id) 1985-03-19 1985-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3922085U JPS61156237U (id) 1985-03-19 1985-03-19

Publications (1)

Publication Number Publication Date
JPS61156237U true JPS61156237U (id) 1986-09-27

Family

ID=30546972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3922085U Pending JPS61156237U (id) 1985-03-19 1985-03-19

Country Status (1)

Country Link
JP (1) JPS61156237U (id)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6418234A (en) * 1987-07-14 1989-01-23 Agency Ind Science Techn Semiconductor evaluation device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6418234A (en) * 1987-07-14 1989-01-23 Agency Ind Science Techn Semiconductor evaluation device

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