JPS61156237U - - Google Patents
Info
- Publication number
- JPS61156237U JPS61156237U JP3922085U JP3922085U JPS61156237U JP S61156237 U JPS61156237 U JP S61156237U JP 3922085 U JP3922085 U JP 3922085U JP 3922085 U JP3922085 U JP 3922085U JP S61156237 U JPS61156237 U JP S61156237U
- Authority
- JP
- Japan
- Prior art keywords
- section
- jig
- semiconductor substrate
- utility
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000011156 evaluation Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3922085U JPS61156237U (id) | 1985-03-19 | 1985-03-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3922085U JPS61156237U (id) | 1985-03-19 | 1985-03-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61156237U true JPS61156237U (id) | 1986-09-27 |
Family
ID=30546972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3922085U Pending JPS61156237U (id) | 1985-03-19 | 1985-03-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61156237U (id) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6418234A (en) * | 1987-07-14 | 1989-01-23 | Agency Ind Science Techn | Semiconductor evaluation device |
-
1985
- 1985-03-19 JP JP3922085U patent/JPS61156237U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6418234A (en) * | 1987-07-14 | 1989-01-23 | Agency Ind Science Techn | Semiconductor evaluation device |