JPS61156231U - - Google Patents
Info
- Publication number
- JPS61156231U JPS61156231U JP3911385U JP3911385U JPS61156231U JP S61156231 U JPS61156231 U JP S61156231U JP 3911385 U JP3911385 U JP 3911385U JP 3911385 U JP3911385 U JP 3911385U JP S61156231 U JPS61156231 U JP S61156231U
- Authority
- JP
- Japan
- Prior art keywords
- adjustment means
- spin coater
- workpiece
- container
- rotary table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3911385U JPS61156231U (fr) | 1985-03-18 | 1985-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3911385U JPS61156231U (fr) | 1985-03-18 | 1985-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61156231U true JPS61156231U (fr) | 1986-09-27 |
Family
ID=30546758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3911385U Pending JPS61156231U (fr) | 1985-03-18 | 1985-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61156231U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02144169A (ja) * | 1988-11-25 | 1990-06-01 | Hitachi Ltd | 塗布装置 |
| JP2012061387A (ja) * | 2010-09-14 | 2012-03-29 | Japancreate Co Ltd | スピンコータ |
-
1985
- 1985-03-18 JP JP3911385U patent/JPS61156231U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02144169A (ja) * | 1988-11-25 | 1990-06-01 | Hitachi Ltd | 塗布装置 |
| JP2012061387A (ja) * | 2010-09-14 | 2012-03-29 | Japancreate Co Ltd | スピンコータ |