JPS61156231U - - Google Patents
Info
- Publication number
- JPS61156231U JPS61156231U JP3911385U JP3911385U JPS61156231U JP S61156231 U JPS61156231 U JP S61156231U JP 3911385 U JP3911385 U JP 3911385U JP 3911385 U JP3911385 U JP 3911385U JP S61156231 U JPS61156231 U JP S61156231U
- Authority
- JP
- Japan
- Prior art keywords
- adjustment means
- spin coater
- workpiece
- container
- rotary table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Description
第1図は、本考案の実施例に係るスピンコータ
ーの縦断正面図、第2図は、その平面図、第3図
は、第2図のa―a線の断面図、第4図は、従来
構造の縦断面図である。
図中、符号1は回転テーブル、2は容器、3は
ワーク、5は排気口、10は吸気口、Aは開度調
節手段、Bは排気量調節手段。
FIG. 1 is a longitudinal sectional front view of a spin coater according to an embodiment of the present invention, FIG. 2 is a plan view thereof, FIG. 3 is a sectional view taken along line a-a in FIG. 2, and FIG. 4 is a FIG. 2 is a vertical cross-sectional view of a conventional structure. In the figure, numeral 1 is a rotary table, 2 is a container, 3 is a workpiece, 5 is an exhaust port, 10 is an intake port, A is an opening adjustment means, and B is an exhaust amount adjustment means.
Claims (1)
1を、上部に吸気口10、下部に排気口5を有す
る容器2に内装してなるスピンコーターにおいて
、 前記吸気口10の開度調節手段Aと、排気量調
節手段Bとを具備してなるスピンコーター。[Claims for Utility Model Registration] A spin coater in which a rotary table 1 that rotates while holding a workpiece 3 therein is housed in a container 2 having an intake port 10 at the top and an exhaust port 5 at the bottom, comprising: A spin coater comprising 10 opening adjustment means A and displacement adjustment means B.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3911385U JPS61156231U (en) | 1985-03-18 | 1985-03-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3911385U JPS61156231U (en) | 1985-03-18 | 1985-03-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61156231U true JPS61156231U (en) | 1986-09-27 |
Family
ID=30546758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3911385U Pending JPS61156231U (en) | 1985-03-18 | 1985-03-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61156231U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02144169A (en) * | 1988-11-25 | 1990-06-01 | Hitachi Ltd | Coating device |
JP2012061387A (en) * | 2010-09-14 | 2012-03-29 | Japancreate Co Ltd | Spin coater |
-
1985
- 1985-03-18 JP JP3911385U patent/JPS61156231U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02144169A (en) * | 1988-11-25 | 1990-06-01 | Hitachi Ltd | Coating device |
JP2012061387A (en) * | 2010-09-14 | 2012-03-29 | Japancreate Co Ltd | Spin coater |