JPS61154239U - - Google Patents
Info
- Publication number
- JPS61154239U JPS61154239U JP3604785U JP3604785U JPS61154239U JP S61154239 U JPS61154239 U JP S61154239U JP 3604785 U JP3604785 U JP 3604785U JP 3604785 U JP3604785 U JP 3604785U JP S61154239 U JPS61154239 U JP S61154239U
- Authority
- JP
- Japan
- Prior art keywords
- attached
- link mechanism
- drive device
- transport device
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3604785U JPS61154239U (ru) | 1985-03-15 | 1985-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3604785U JPS61154239U (ru) | 1985-03-15 | 1985-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61154239U true JPS61154239U (ru) | 1986-09-25 |
Family
ID=30540881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3604785U Pending JPS61154239U (ru) | 1985-03-15 | 1985-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61154239U (ru) |
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1985
- 1985-03-15 JP JP3604785U patent/JPS61154239U/ja active Pending