JPS61154232U - - Google Patents

Info

Publication number
JPS61154232U
JPS61154232U JP3913185U JP3913185U JPS61154232U JP S61154232 U JPS61154232 U JP S61154232U JP 3913185 U JP3913185 U JP 3913185U JP 3913185 U JP3913185 U JP 3913185U JP S61154232 U JPS61154232 U JP S61154232U
Authority
JP
Japan
Prior art keywords
vacuum suction
suction chamber
air filter
main vacuum
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3913185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0450268Y2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985039131U priority Critical patent/JPH0450268Y2/ja
Publication of JPS61154232U publication Critical patent/JPS61154232U/ja
Application granted granted Critical
Publication of JPH0450268Y2 publication Critical patent/JPH0450268Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1985039131U 1985-03-19 1985-03-19 Expired JPH0450268Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985039131U JPH0450268Y2 (zh) 1985-03-19 1985-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985039131U JPH0450268Y2 (zh) 1985-03-19 1985-03-19

Publications (2)

Publication Number Publication Date
JPS61154232U true JPS61154232U (zh) 1986-09-25
JPH0450268Y2 JPH0450268Y2 (zh) 1992-11-26

Family

ID=30546793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985039131U Expired JPH0450268Y2 (zh) 1985-03-19 1985-03-19

Country Status (1)

Country Link
JP (1) JPH0450268Y2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03194178A (ja) * 1989-12-21 1991-08-23 Ebara Corp 真空ポンプのつまり検知装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56162250U (zh) * 1980-05-07 1981-12-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56162250U (zh) * 1980-05-07 1981-12-02

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03194178A (ja) * 1989-12-21 1991-08-23 Ebara Corp 真空ポンプのつまり検知装置

Also Published As

Publication number Publication date
JPH0450268Y2 (zh) 1992-11-26

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