JPS61154232U - - Google Patents

Info

Publication number
JPS61154232U
JPS61154232U JP3913185U JP3913185U JPS61154232U JP S61154232 U JPS61154232 U JP S61154232U JP 3913185 U JP3913185 U JP 3913185U JP 3913185 U JP3913185 U JP 3913185U JP S61154232 U JPS61154232 U JP S61154232U
Authority
JP
Japan
Prior art keywords
vacuum suction
suction chamber
air filter
main vacuum
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3913185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0450268Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985039131U priority Critical patent/JPH0450268Y2/ja
Publication of JPS61154232U publication Critical patent/JPS61154232U/ja
Application granted granted Critical
Publication of JPH0450268Y2 publication Critical patent/JPH0450268Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1985039131U 1985-03-19 1985-03-19 Expired JPH0450268Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985039131U JPH0450268Y2 (enrdf_load_stackoverflow) 1985-03-19 1985-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985039131U JPH0450268Y2 (enrdf_load_stackoverflow) 1985-03-19 1985-03-19

Publications (2)

Publication Number Publication Date
JPS61154232U true JPS61154232U (enrdf_load_stackoverflow) 1986-09-25
JPH0450268Y2 JPH0450268Y2 (enrdf_load_stackoverflow) 1992-11-26

Family

ID=30546793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985039131U Expired JPH0450268Y2 (enrdf_load_stackoverflow) 1985-03-19 1985-03-19

Country Status (1)

Country Link
JP (1) JPH0450268Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03194178A (ja) * 1989-12-21 1991-08-23 Ebara Corp 真空ポンプのつまり検知装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56162250U (enrdf_load_stackoverflow) * 1980-05-07 1981-12-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56162250U (enrdf_load_stackoverflow) * 1980-05-07 1981-12-02

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03194178A (ja) * 1989-12-21 1991-08-23 Ebara Corp 真空ポンプのつまり検知装置

Also Published As

Publication number Publication date
JPH0450268Y2 (enrdf_load_stackoverflow) 1992-11-26

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