JPS61153961U - - Google Patents

Info

Publication number
JPS61153961U
JPS61153961U JP3807085U JP3807085U JPS61153961U JP S61153961 U JPS61153961 U JP S61153961U JP 3807085 U JP3807085 U JP 3807085U JP 3807085 U JP3807085 U JP 3807085U JP S61153961 U JPS61153961 U JP S61153961U
Authority
JP
Japan
Prior art keywords
irradiated
chamber
irradiation
cooling
irradiation chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3807085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3807085U priority Critical patent/JPS61153961U/ja
Publication of JPS61153961U publication Critical patent/JPS61153961U/ja
Pending legal-status Critical Current

Links

JP3807085U 1985-03-15 1985-03-15 Pending JPS61153961U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3807085U JPS61153961U (enrdf_load_stackoverflow) 1985-03-15 1985-03-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3807085U JPS61153961U (enrdf_load_stackoverflow) 1985-03-15 1985-03-15

Publications (1)

Publication Number Publication Date
JPS61153961U true JPS61153961U (enrdf_load_stackoverflow) 1986-09-24

Family

ID=30544737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3807085U Pending JPS61153961U (enrdf_load_stackoverflow) 1985-03-15 1985-03-15

Country Status (1)

Country Link
JP (1) JPS61153961U (enrdf_load_stackoverflow)

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