JPS61151342U - - Google Patents

Info

Publication number
JPS61151342U
JPS61151342U JP3313885U JP3313885U JPS61151342U JP S61151342 U JPS61151342 U JP S61151342U JP 3313885 U JP3313885 U JP 3313885U JP 3313885 U JP3313885 U JP 3313885U JP S61151342 U JPS61151342 U JP S61151342U
Authority
JP
Japan
Prior art keywords
wafer
wafer carrier
carrier
opening
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3313885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3313885U priority Critical patent/JPS61151342U/ja
Publication of JPS61151342U publication Critical patent/JPS61151342U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP3313885U 1985-03-08 1985-03-08 Pending JPS61151342U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3313885U JPS61151342U (enrdf_load_stackoverflow) 1985-03-08 1985-03-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3313885U JPS61151342U (enrdf_load_stackoverflow) 1985-03-08 1985-03-08

Publications (1)

Publication Number Publication Date
JPS61151342U true JPS61151342U (enrdf_load_stackoverflow) 1986-09-18

Family

ID=30535304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3313885U Pending JPS61151342U (enrdf_load_stackoverflow) 1985-03-08 1985-03-08

Country Status (1)

Country Link
JP (1) JPS61151342U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57155744A (en) * 1981-03-23 1982-09-25 Hitachi Ltd Jig for wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57155744A (en) * 1981-03-23 1982-09-25 Hitachi Ltd Jig for wafer

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