JPS61151335U - - Google Patents
Info
- Publication number
- JPS61151335U JPS61151335U JP3337185U JP3337185U JPS61151335U JP S61151335 U JPS61151335 U JP S61151335U JP 3337185 U JP3337185 U JP 3337185U JP 3337185 U JP3337185 U JP 3337185U JP S61151335 U JPS61151335 U JP S61151335U
- Authority
- JP
- Japan
- Prior art keywords
- utility
- model registration
- steam
- steam drying
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 claims description 6
- 239000002904 solvent Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985033371U JPH058676Y2 (US06534493-20030318-C00166.png) | 1985-03-11 | 1985-03-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985033371U JPH058676Y2 (US06534493-20030318-C00166.png) | 1985-03-11 | 1985-03-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61151335U true JPS61151335U (US06534493-20030318-C00166.png) | 1986-09-18 |
JPH058676Y2 JPH058676Y2 (US06534493-20030318-C00166.png) | 1993-03-04 |
Family
ID=30535761
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985033371U Expired - Lifetime JPH058676Y2 (US06534493-20030318-C00166.png) | 1985-03-11 | 1985-03-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH058676Y2 (US06534493-20030318-C00166.png) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63161623A (ja) * | 1986-12-25 | 1988-07-05 | Tokuyama Soda Co Ltd | 乾燥方法 |
JPS63105329U (US06534493-20030318-C00166.png) * | 1986-12-25 | 1988-07-08 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6123324A (ja) * | 1984-07-11 | 1986-01-31 | Hitachi Ltd | 乾燥装置 |
-
1985
- 1985-03-11 JP JP1985033371U patent/JPH058676Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6123324A (ja) * | 1984-07-11 | 1986-01-31 | Hitachi Ltd | 乾燥装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63161623A (ja) * | 1986-12-25 | 1988-07-05 | Tokuyama Soda Co Ltd | 乾燥方法 |
JPS63105329U (US06534493-20030318-C00166.png) * | 1986-12-25 | 1988-07-08 |
Also Published As
Publication number | Publication date |
---|---|
JPH058676Y2 (US06534493-20030318-C00166.png) | 1993-03-04 |