JPS61150U - Ultraviolet irradiation equipment for photoresist exposure - Google Patents

Ultraviolet irradiation equipment for photoresist exposure

Info

Publication number
JPS61150U
JPS61150U JP1984083235U JP8323584U JPS61150U JP S61150 U JPS61150 U JP S61150U JP 1984083235 U JP1984083235 U JP 1984083235U JP 8323584 U JP8323584 U JP 8323584U JP S61150 U JPS61150 U JP S61150U
Authority
JP
Japan
Prior art keywords
photoresist exposure
ultraviolet irradiation
lamp
irradiation equipment
air cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984083235U
Other languages
Japanese (ja)
Inventor
宣英 阿部
恒 木本
博美 梅田
Original Assignee
株式会社 タムラ製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 タムラ製作所 filed Critical 株式会社 タムラ製作所
Priority to JP1984083235U priority Critical patent/JPS61150U/en
Publication of JPS61150U publication Critical patent/JPS61150U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案装置の一実施例を示す断面図および回路
図の組合せ図、第２図はその作用を示すグラフである。 １・・・ランプ、２・・・風冷装置、７・・・ヒータ、
１１・・・赤外線放射温度計。FIG. 1 is a combination diagram of a sectional view and a circuit diagram showing one embodiment of the device of the present invention, and FIG. 2 is a graph showing its operation. 1...Lamp, 2...Air cooling device, 7...Heater,
11...Infrared radiation thermometer.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）フォトレジスト露光用の紫外線を照射するランプ
に対して風冷装置を設けたフォトレジスト露光用紫外線
照射装置において、上記風冷装置に上記ランプを点灯す
る前に通電されるヒータを設けたことを特徴とするフォ
トレジスト露光用紫外線照射装置。(1) In an ultraviolet irradiation device for photoresist exposure in which an air cooling device is provided for a lamp that irradiates ultraviolet rays for photoresist exposure, the air cooling device is provided with a heater that is energized before lighting the lamp. An ultraviolet irradiation device for photoresist exposure characterized by the following. （２）風冷装置は、ランペ点灯後にランプ温度を赤外線
放射温度計によって測定してほぼ一定に保持する機構を
有することを特徴とする実用新案登録請求の範囲第１項
記載のフォトレジスト露光用紫外線照射装置。(2) The air cooling device has a mechanism for measuring the lamp temperature with an infrared radiation thermometer and keeping it substantially constant after the lamp is turned on, for photoresist exposure according to claim 1 of the utility model registration claim. Ultraviolet irradiation device.
JP1984083235U 1984-06-05 1984-06-05 Ultraviolet irradiation equipment for photoresist exposure Pending JPS61150U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984083235U JPS61150U (en) 1984-06-05 1984-06-05 Ultraviolet irradiation equipment for photoresist exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984083235U JPS61150U (en) 1984-06-05 1984-06-05 Ultraviolet irradiation equipment for photoresist exposure

Publications (1)

Publication Number Publication Date
JPS61150U true JPS61150U (en) 1986-01-06

Family

ID=30631676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984083235U Pending JPS61150U (en) 1984-06-05 1984-06-05 Ultraviolet irradiation equipment for photoresist exposure

Country Status (1)

Country Link
JP (1) JPS61150U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933798A (en) * 1982-08-19 1984-02-23 富士ゼロックス株式会社 Device for firing fluorescent lamp

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933798A (en) * 1982-08-19 1984-02-23 富士ゼロックス株式会社 Device for firing fluorescent lamp

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