JPS61150501U - - Google Patents
Info
- Publication number
- JPS61150501U JPS61150501U JP3482285U JP3482285U JPS61150501U JP S61150501 U JPS61150501 U JP S61150501U JP 3482285 U JP3482285 U JP 3482285U JP 3482285 U JP3482285 U JP 3482285U JP S61150501 U JPS61150501 U JP S61150501U
- Authority
- JP
- Japan
- Prior art keywords
- divided
- pressure regulator
- exhaust pipes
- exhaust
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Description
図面は本考案の一実施例を示す縦断面図である
。
１…排気管、２…圧力調整管、３…真空シール
、４…駆動装置。
The drawing is a longitudinal sectional view showing an embodiment of the present invention. 1... Exhaust pipe, 2... Pressure adjustment pipe, 3... Vacuum seal, 4... Drive device.
Claims (1)
気管を中途部で分割するとともに、この分割され
た各排気管を平行に配置し、上記各排気管の端部
内側にＵ字状を有する圧力調整管の両端部を摺動
自在に挿入したことを特徴とする圧力調整器。 An exhaust pipe that connects a vacuum processing container and a vacuum evacuation device is divided in the middle, and each of the divided exhaust pipes is arranged in parallel, and the pressure adjustment pipe has a U-shape inside the end of each of the exhaust pipes. A pressure regulator characterized in that both ends of the pressure regulator are slidably inserted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3482285U JPH0410401Y2 (en) | 1985-03-12 | 1985-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3482285U JPH0410401Y2 (en) | 1985-03-12 | 1985-03-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61150501U true JPS61150501U (en) | 1986-09-17 |
| JPH0410401Y2 JPH0410401Y2 (en) | 1992-03-16 |
Family
ID=30538551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3482285U Expired JPH0410401Y2 (en) | 1985-03-12 | 1985-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410401Y2 (en) |
-
1985
- 1985-03-12 JP JP3482285U patent/JPH0410401Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0410401Y2 (en) | 1992-03-16 |