JPH01140815U - - Google Patents
Info
- Publication number
- JPH01140815U JPH01140815U JP3628788U JP3628788U JPH01140815U JP H01140815 U JPH01140815 U JP H01140815U JP 3628788 U JP3628788 U JP 3628788U JP 3628788 U JP3628788 U JP 3628788U JP H01140815 U JPH01140815 U JP H01140815U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- manufacturing apparatus
- semiconductor manufacturing
- flexible hose
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
Description
第１図は、本考案の一実施例の半導体製造装置
の要部縦断面図である。
１……反応室、２……ワンタツチ継手、３……
Ｏリング、４……フレキシブルホース、５……排
気管。
FIG. 1 is a longitudinal cross-sectional view of a main part of a semiconductor manufacturing apparatus according to an embodiment of the present invention. 1...Reaction chamber, 2...Push-in joint, 3...
O-ring, 4...flexible hose, 5...exhaust pipe.
Claims (1)
装置において、前記反応室の排気口にワンタツチ
継手とフレキシブルホースを設けたことを特徴と
する半導体製造装置。 1. A semiconductor manufacturing apparatus comprising a reaction chamber and a vacuum exhaust system, characterized in that a one-touch joint and a flexible hose are provided at an exhaust port of the reaction chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3628788U JPH01140815U (en) | 1988-03-22 | 1988-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3628788U JPH01140815U (en) | 1988-03-22 | 1988-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01140815U true JPH01140815U (en) | 1989-09-27 |
Family
ID=31262899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3628788U Pending JPH01140815U (en) | 1988-03-22 | 1988-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01140815U (en) |
-
1988
- 1988-03-22 JP JP3628788U patent/JPH01140815U/ja active Pending