JPS61149978U - - Google Patents
Info
- Publication number
- JPS61149978U JPS61149978U JP3451485U JP3451485U JPS61149978U JP S61149978 U JPS61149978 U JP S61149978U JP 3451485 U JP3451485 U JP 3451485U JP 3451485 U JP3451485 U JP 3451485U JP S61149978 U JPS61149978 U JP S61149978U
- Authority
- JP
- Japan
- Prior art keywords
- inductor
- groove
- permanent magnet
- iron plate
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims 2
- 230000004907 flux Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Linear Motors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3451485U JPS61149978U (de) | 1985-03-11 | 1985-03-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3451485U JPS61149978U (de) | 1985-03-11 | 1985-03-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61149978U true JPS61149978U (de) | 1986-09-16 |
Family
ID=30537954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3451485U Pending JPS61149978U (de) | 1985-03-11 | 1985-03-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61149978U (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190114817A (ko) * | 2018-03-30 | 2019-10-10 | 캐논 가부시끼가이샤 | 스테이지 구동 장치, 리소그래피 장치, 및 물품 제조 방법 |
-
1985
- 1985-03-11 JP JP3451485U patent/JPS61149978U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190114817A (ko) * | 2018-03-30 | 2019-10-10 | 캐논 가부시끼가이샤 | 스테이지 구동 장치, 리소그래피 장치, 및 물품 제조 방법 |
US11543745B2 (en) | 2018-03-30 | 2023-01-03 | Canon Kabushiki Kaisha | Stage driving apparatus, lithography apparatus, and method of manufacturing article |
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