JPS61149851U - - Google Patents

Info

Publication number

JPS61149851U

JPS61149851U JP3453185U JP3453185U JPS61149851U JP S61149851 U JPS61149851 U JP S61149851U JP 3453185 U JP3453185 U JP 3453185U JP 3453185 U JP3453185 U JP 3453185U JP S61149851 U JPS61149851 U JP S61149851U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

semiconductor

thin film

glass thin

pressure

Prior art date

1985-03-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 11
• 239000000758 substrate Substances 0.000 claims description 6
• 239000011521 glass Substances 0.000 claims description 4
• 239000010409 thin film Substances 0.000 claims description 4
• 238000001514 detection method Methods 0.000 claims description 2
• 230000015556 catabolic process Effects 0.000 claims 1
• 239000004020 conductor Substances 0.000 claims 1
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 7
• 238000000034 method Methods 0.000 description 1