JPS61149329U - - Google Patents
Info
- Publication number
- JPS61149329U JPS61149329U JP3124185U JP3124185U JPS61149329U JP S61149329 U JPS61149329 U JP S61149329U JP 3124185 U JP3124185 U JP 3124185U JP 3124185 U JP3124185 U JP 3124185U JP S61149329 U JPS61149329 U JP S61149329U
- Authority
- JP
- Japan
- Prior art keywords
- wafer chuck
- exposure machine
- alignment exposure
- receiving element
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3124185U JPS61149329U (hu) | 1985-03-05 | 1985-03-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3124185U JPS61149329U (hu) | 1985-03-05 | 1985-03-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61149329U true JPS61149329U (hu) | 1986-09-16 |
Family
ID=30531668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3124185U Pending JPS61149329U (hu) | 1985-03-05 | 1985-03-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61149329U (hu) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011138058A (ja) * | 2009-12-28 | 2011-07-14 | Hitachi High-Technologies Corp | 露光装置、露光方法、及び表示用パネル基板の製造方法 |
-
1985
- 1985-03-05 JP JP3124185U patent/JPS61149329U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011138058A (ja) * | 2009-12-28 | 2011-07-14 | Hitachi High-Technologies Corp | 露光装置、露光方法、及び表示用パネル基板の製造方法 |