JPS61149266U - - Google Patents

Info

Publication number

JPS61149266U

JPS61149266U JP3361885U JP3361885U JPS61149266U JP S61149266 U JPS61149266 U JP S61149266U JP 3361885 U JP3361885 U JP 3361885U JP 3361885 U JP3361885 U JP 3361885U JP S61149266 U JPS61149266 U JP S61149266U

Authority

JP

Japan

Prior art keywords

plasma

electrode

charged particle

particle source

chamber

Prior art date

1985-03-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000605 extraction Methods 0.000 claims description 7
• 239000002245 particle Substances 0.000 claims 4
• 239000000284 extract Substances 0.000 claims 1
• 239000011148 porous material Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000010884 ion-beam technique Methods 0.000 description 1