JPS6114918B2 - - Google Patents
Info
- Publication number
- JPS6114918B2 JPS6114918B2 JP5122677A JP5122677A JPS6114918B2 JP S6114918 B2 JPS6114918 B2 JP S6114918B2 JP 5122677 A JP5122677 A JP 5122677A JP 5122677 A JP5122677 A JP 5122677A JP S6114918 B2 JPS6114918 B2 JP S6114918B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- reinforced concrete
- airtight
- electron beam
- beam processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 29
- 239000011150 reinforced concrete Substances 0.000 claims description 29
- 238000010894 electron beam technology Methods 0.000 claims description 20
- 238000012423 maintenance Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000003754 machining Methods 0.000 claims description 5
- 229920003002 synthetic resin Polymers 0.000 claims description 4
- 239000000057 synthetic resin Substances 0.000 claims description 4
- 230000003014 reinforcing effect Effects 0.000 description 17
- 229910000831 Steel Inorganic materials 0.000 description 11
- 239000010959 steel Substances 0.000 description 11
- 238000003466 welding Methods 0.000 description 9
- 239000004567 concrete Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000012856 packing Methods 0.000 description 7
- 239000012779 reinforcing material Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Description
【発明の詳細な説明】
本発明は大形構造物の電子ビーム加工に好適な
電子ビーム加工用真空チヤンバに関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum chamber for electron beam processing suitable for electron beam processing of large structures.
最近電子ビームにより大形の被加工物を効率的
に加工したいとする要望は増加する一方である。
理論的には、大形被加工物を真空チヤンバ内に挿
入できれば、大形被加工物の電子ビーム加工に必
要な高真空が容易に得られるので、溶込みを深く
できるという電子ビーム加工の能力を十分に発揮
させて効率的に高品質の溶接結果を得ることが可
能である。しかし真空チヤンバはその内部圧力が
10-2〜10-4Torr以下の高真空であるため、チヤン
バの壁面１m2当り10トンの大気圧に耐え得る構造
にしなければならない。このように電子ビーム加
工用真空チヤンバは気密性と大気圧に耐える強度
とを要求されるので、従来のチヤンバはもつぱら
鋼板により製作されていた。しかし被加工物が超
大形化した場合（例えば長さ数十メートル、管外
径十数メートル、厚み数百ミリの超大形鋼管の縦
継溶接及び円周溶接を行なうような場合）には、
このような大形の構造物を挿入でき、しかも大気
圧に耐え得るような気密性を有するチヤンバを製
作することは、経済的及び労力的に極めて困難で
ある。また鋼板を用いた場合電子ビームから発生
するＸ線を遮蔽するための鉛板を鋼板にはり付け
る作業が必要になるが、この作業にも過大な経済
的及び労力的負担を必要とする。このようなこと
から、従来は超大形の被加工物を挿入きるような
全真空電子ビーム加工用チヤンバを製作すること
は断念せざるを得なかつた。 Recently, the demand for efficiently processing large workpieces using electron beams has been increasing.
Theoretically, if a large workpiece can be inserted into a vacuum chamber, the high vacuum necessary for electron beam processing of large workpieces can be easily obtained, which increases the ability of electron beam processing to achieve deep penetration. It is possible to make full use of this and efficiently obtain high-quality welding results. However, the internal pressure of a vacuum chamber is
Since the chamber is in a high vacuum of less than 10 -2 to 10 -4 Torr, the structure must be able to withstand an atmospheric pressure of 10 tons per square meter of chamber wall. As described above, since vacuum chambers for electron beam processing are required to be airtight and strong enough to withstand atmospheric pressure, conventional chambers have been made entirely of steel plates. However, when the workpiece becomes extremely large (for example, when performing vertical joint welding and circumferential welding of extremely large steel pipes with a length of several tens of meters, an outer diameter of several tens of meters, and a thickness of several hundred millimeters),
It is extremely difficult economically and labor-wise to manufacture a chamber into which such a large structure can be inserted and which is airtight enough to withstand atmospheric pressure. Furthermore, when a steel plate is used, it is necessary to attach a lead plate to the steel plate to shield X-rays generated from the electron beam, but this process also requires an excessive economic and labor burden. For these reasons, it has been necessary to give up on manufacturing a full-vacuum electron beam machining chamber into which extremely large workpieces can be inserted.
本発明の目的は、超大形の被加工物を収納で
き、しかも少ない経済的及び労力的負担で製作で
きる全真空の電子ビーム加工用真空チヤンバを提
供することにある。 SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum chamber for electron beam machining that is completely vacuum capable of accommodating extremely large workpieces and that can be manufactured with less economical and labor burden.
本発明の真空チヤンバは、安価で製作時の作業
性が良く、また圧縮強度が大きい上にＸ線の遮蔽
効果が大きい鉄筋コンクリートを主要部に使用
し、しかも十分な気密性をもたせたことを特徴と
したものである。 The vacuum chamber of the present invention is characterized by being inexpensive, easy to work with during manufacturing, using reinforced concrete for the main part, which has high compressive strength and has a large X-ray shielding effect, and has sufficient airtightness. That is.
以下本発明の実施例を図面を参照して詳細に説
明する。 Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明の一実施例を示す正面図であ
り、第２図は第１図のＡ―Ａ線断面図である。こ
れらの図において１は矩形、円形等の適宜の断面
形状を有し両端が開口した真空チヤンバの本体、
２，２は真空チヤンバの両端開口部を閉じる扉で
ある。真空チヤンバ本体１の壁部は鉄筋３，３、
…とコンクリート４とからなる鉄筋コンクリート
部５と、この鉄筋コンクリート部の内面に付着さ
れた気密保持材６とからなつている。気密保持材
６は例えばステンレス鋼板等の金属板からなり、
一端がコンクリート４内に埋設された固定金具
７，７、…の他端にボルト締め、溶接等により結
合されて鉄筋コンクリート部５の内面に固着され
る。図示の例では各固定金具７が棒状部７ａとこ
の棒状部７ａの一端に設けられた拡大部または突
起等からなる係止部７ｂとを有する形状に形成さ
れており、その係止部７ｂが鉄筋３，３に係止さ
れる状態でコンクリート４中に埋設されている。
尚固定金具７の形状及び設け方は任意である。例
えば固定金具としてボルトを用いる場合、これを
鉄筋に係合させることなく単にコンクリート４中
に埋設するだけでもよく、また固定金具７を鉄筋
３に予め溶接等により固着しておいてもよい。上
記のように鉄筋コンクリート部５の内面に気密保
持材６を配置した場合には、チヤンバ内を真空に
した際にこの気密保持材６が大気圧による力を受
けるので、この力に耐えるように固定金具７の数
を増す等して気密保持材６の取付強度を十分大き
くしておくことが必要である。 FIG. 1 is a front view showing an embodiment of the present invention, and FIG. 2 is a sectional view taken along the line AA in FIG. In these figures, 1 is a main body of a vacuum chamber having an appropriate cross-sectional shape such as rectangular or circular and open at both ends;
2, 2 are doors that close the openings at both ends of the vacuum chamber. The walls of the vacuum chamber body 1 are made of reinforcing bars 3, 3,
... and concrete 4, and an airtight maintenance material 6 attached to the inner surface of this reinforced concrete part. The airtight material 6 is made of a metal plate such as a stainless steel plate,
One end is connected to the other end of the fixing fittings 7, 7, etc. buried in the concrete 4 by bolting, welding, etc., and is fixed to the inner surface of the reinforced concrete part 5. In the illustrated example, each fixture 7 is formed in a shape having a rod-shaped portion 7a and a locking portion 7b consisting of an enlarged portion or a protrusion provided at one end of the rod-shaped portion 7a, and the locking portion 7b is It is buried in concrete 4 while being locked to reinforcing bars 3, 3.
Note that the shape and method of providing the fixture 7 are arbitrary. For example, when bolts are used as the fixing metal fittings, they may be simply buried in the concrete 4 without being engaged with the reinforcing bars, or the fixing metal fittings 7 may be fixed to the reinforcing bars 3 in advance by welding or the like. When the airtight maintenance material 6 is arranged on the inner surface of the reinforced concrete part 5 as described above, the airtightness maintenance material 6 is subjected to force due to atmospheric pressure when the chamber is evacuated, so it must be fixed to withstand this force. It is necessary to increase the mounting strength of the airtight retaining member 6 by increasing the number of metal fittings 7 or the like.
真空チヤンバ本体１の壁部の適宜の位置には任
意の形状の貫通孔（図示の例では角孔）８が設け
られる。この貫通孔にはチヤンバの外面に係接す
るフランジ９ａを有する筒状の補強材９が嵌合さ
れ、この補強材のチヤンバ内に露呈する端部の全
周が気密保持材６に溶接等により気密に接合され
ている。補強材９のフランジ９ａ上にはパツキン
グ１１を介して鉛入ガラス板１２が配置され、こ
のガラス板はパツキング１１を貫通するボルト１
３及びこのボルトに螺合するナツトにより補強材
９に気密に固定されている。そして貫通孔８、補
強材９、パツキング１１及び鉛入ガラス板１２に
よりチヤンバ内を観察するための覗き窓が構成さ
れている。 A through hole 8 of an arbitrary shape (a square hole in the illustrated example) is provided at an appropriate position on the wall of the vacuum chamber body 1 . A cylindrical reinforcing material 9 having a flange 9a that engages with the outer surface of the chamber is fitted into this through hole, and the entire circumference of the end of this reinforcing material exposed inside the chamber is sealed by welding to an airtight retaining material 6 or the like. is joined to. A lead-containing glass plate 12 is arranged on the flange 9a of the reinforcing member 9 via a packing 11, and this glass plate is attached to a bolt 1 passing through the packing 11.
3 and is airtightly fixed to the reinforcing member 9 by a nut screwed onto this bolt. The through hole 8, the reinforcing material 9, the packing 11, and the leaded glass plate 12 constitute a viewing window for observing the inside of the chamber.
貫通孔８が角形の場合、補強材９は例えば断面
Ｌ字形の板を組合せて溶接することにより形成す
ることができ、貫通孔８が円形の場合には例えば
管の一端にフランジを溶着することにより形成で
きる。 When the through hole 8 is square, the reinforcing material 9 can be formed, for example, by combining and welding plates having an L-shaped cross section, and when the through hole 8 is circular, for example, a flange can be welded to one end of the pipe. It can be formed by
真空チヤンバ本体１の両端面（鉄筋コンクリー
ト部５の端面）にはその全体に亘つて板状の部材
からなる補強材１４が当接され、これらの補強材
１４はチヤンバ本体の開口端の全周に亘つて気密
保持材６に溶接等により気密に接合されている。
補強材１４の端面には、その全周に亘つてパツキ
ング１５が固着され、また扉２を閉じる際に用い
られる適宜の個数のボルト１６の一端が固着され
ている。扉２は、鉄筋３，３、…とコンクリート
４からなる板状の鉄筋コンクリート部５′と、こ
の鉄筋コンクリート部５′の側面に嵌着された断
面コの字形の補強材１７と、前記と同様の固定金
具７，７、…により鉄筋コンクリート部５′に固
着された鋼板等からなる気密保持材６′とからな
つている。気密保持材６′は真空チヤンバ本体１
の開口端全体を覆うに十分な大きさを有し、蝶番
１８により補強材１４に回動自在に取付けられて
いる。気密保持材６′にはまた扉２を閉じた際に
前記ボルト１６が貫通する孔１９が設けられ、気
密保持材６′がパツキング１５を介して補強材１
４に押圧された状態でボルト１６に図示しないナ
ツトが螺合されて真空チヤンバ本体１の両端開口
部が気密に閉じられるようになつている。尚蓋２
を構成する鉄筋コンクリート部５′はチヤンバ内
からのＸ線の漏洩を防止するように、少なくとも
真空チヤンバ本体１の両端開口部の内のり寸法よ
りは大きく形成されている。 Reinforcing members 14 made of plate-shaped members are in contact with both end faces of the vacuum chamber main body 1 (end faces of the reinforced concrete part 5) over the entirety thereof, and these reinforcing members 14 are attached to the entire circumference of the open end of the chamber main body. It is hermetically joined to the airtight maintenance member 6 by welding or the like.
Packing 15 is fixed to the end face of the reinforcing member 14 over its entire circumference, and one end of an appropriate number of bolts 16 used when closing the door 2 is fixed. The door 2 includes a plate-shaped reinforced concrete part 5' made of reinforcing bars 3, 3, ... and concrete 4, a reinforcing member 17 having a U-shaped cross section fitted to the side surface of this reinforced concrete part 5', and a reinforcing member 17 similar to the above. It consists of an airtight retaining member 6' made of a steel plate or the like fixed to the reinforced concrete part 5' by fixing fittings 7, 7, . . . The airtight retaining material 6' is the vacuum chamber body 1
It has a sufficient size to cover the entire open end of the frame, and is rotatably attached to the reinforcing member 14 by a hinge 18. The air-tight maintaining material 6' is also provided with a hole 19 through which the bolt 16 passes when the door 2 is closed, and the air-tight maintaining material 6' is inserted into the reinforcing material 1 through the packing 15.
4, nuts (not shown) are screwed onto the bolts 16 so that the openings at both ends of the vacuum chamber body 1 are hermetically closed. Sho lid 2
The reinforced concrete portion 5' constituting the chamber is formed to be at least larger than the inner dimensions of the openings at both ends of the vacuum chamber body 1 so as to prevent leakage of X-rays from inside the chamber.
真空チヤンバ本体１の壁部にはまた電子銃２０
が取付けられる。この電子銃は、例えば第１図に
実線で示したように、真空チヤンバ本体１の固定
位置に取付けられ、チヤンバ本体の壁部を貫通す
る孔を通してチヤンバ内の被加工物に電子ビーム
を照射する。この場合は被加工物をチヤンバ内で
電子銃に対して相対的に移動させて加工を行な
う。また第１図に破線で示したように、電子銃２
０を真空チヤンバ内に移動可能に配置して図示し
ない駆動源によりこの電子銃を移動させつつ加工
を行なうようにしてもよい。 There is also an electron gun 20 on the wall of the vacuum chamber body 1.
is installed. For example, as shown by the solid line in FIG. 1, this electron gun is attached to a fixed position in the vacuum chamber body 1, and irradiates the workpiece in the chamber with an electron beam through a hole penetrating the wall of the chamber body. . In this case, processing is performed by moving the workpiece within the chamber relative to the electron gun. In addition, as shown by the broken line in FIG. 1, the electron gun 2
0 may be movably disposed in a vacuum chamber, and the electron gun may be moved while being processed by a drive source (not shown).
第３図は本発明の他の実施例を示したもので、
この実施例では覗き窓部の補強材９′として鉄筋
コンクリート部５の内面及び外面に係合するフラ
ンジ９′ａ，９′ａを有する断面コの字形の筒状部
材が用いられ、また真空チヤンバ本体１の両端に
取付けられる補強材１４′としては鉄筋コンクリ
ート部５の端部に嵌合する断面コの字形の部材が
用いられている。鉄筋コンクリート部５の内面に
は気密保持材６としてエポキシ樹脂の如き合成樹
脂のコーテイングが施されている。このように合
成樹脂のコーテイングを気密保持材として用いれ
ば、第２図に示したように多数の固定金具７をコ
ンクリート中に埋設してこの固定金具と気密保持
材とを結合する面倒な作業を必要としないので、
真空チヤンバを製作するために要する労力的負担
を大幅に軽減することができる。また第３図の実
施例では、扉２が鋼板等からなる気密保持材６′
とこの気密保持材６′に固着された鉛板２１とか
らなつている。このように構成すると扉２の重量
を軽減することができる。またこの実施例では、
扉２の部分の気密を保つパツキングとして板状の
パツキング１５′が用いられている。 FIG. 3 shows another embodiment of the present invention,
In this embodiment, a cylindrical member having a U-shaped cross section and having flanges 9'a and 9'a that engage with the inner and outer surfaces of the reinforced concrete part 5 is used as the reinforcing member 9' of the viewing window part, and a cylindrical member having a U-shaped cross section is used. As the reinforcing members 14' attached to both ends of the reinforced concrete section 1, members having a U-shaped cross section that fit into the ends of the reinforced concrete section 5 are used. The inner surface of the reinforced concrete portion 5 is coated with a synthetic resin such as epoxy resin as an airtight material 6. If a synthetic resin coating is used as an airtight material in this way, the troublesome work of embedding a large number of fixing fittings 7 in concrete and joining these fixing fittings to the airtight maintaining material can be avoided, as shown in Fig. 2. Because I don't need it,
The labor burden required to manufacture a vacuum chamber can be significantly reduced. Furthermore, in the embodiment shown in FIG.
and a lead plate 21 fixed to this airtight retaining material 6'. With this configuration, the weight of the door 2 can be reduced. Also, in this example,
A plate-shaped packing 15' is used as packing to keep the door 2 airtight.
第４図は本発明の他の実施例を示したもので、
この実施例では真空チヤンバ本体１の鉄筋コンク
リート部５の内面及び外面の双方に鋼板等からな
る気密保持材６が固着されている。これらの気密
保持材６は第２図に示したのと同様の固定金具７
により固定されており、各気密保持材と補強材
９′，１４′との接合部は溶接等により気密に接合
されている。その他の点は第３図と同様に構成さ
れている。このように気密保持材６を鉄筋コンク
リート部５の外面に付着させた場合には、真空チ
ヤンバ内が真空にされたときに気密保持材６が鉄
筋コンクリートに吸着されるので、大気圧による
過大な圧力に耐えることができ、しかも第２図に
示したように多数の固定金具７を用いる必要がな
いので気密保持材を固着する際の労力的負担を大
幅に軽減できる。またこの場合、鉄筋コンクリー
ト部５の内面側の気密保持材６には大気圧がかか
らないので、この内面側の気密保持材を固定する
固定金具も第２図の場合より減らすことができ
る。 FIG. 4 shows another embodiment of the present invention,
In this embodiment, an airtight retaining material 6 made of a steel plate or the like is fixed to both the inner and outer surfaces of the reinforced concrete portion 5 of the vacuum chamber body 1. These airtight retainers 6 are attached to fixing fittings 7 similar to those shown in FIG.
The joints between each airtight maintaining member and the reinforcing members 9' and 14' are airtightly joined by welding or the like. The other points are constructed in the same manner as in FIG. 3. When the airtightness maintaining material 6 is attached to the outer surface of the reinforced concrete part 5 in this way, the airtightness maintaining material 6 is adsorbed to the reinforced concrete when the vacuum chamber is evacuated, so that it is not exposed to excessive pressure due to atmospheric pressure. Moreover, since there is no need to use a large number of fixing fittings 7 as shown in FIG. 2, the labor burden when fixing the air-tight material can be greatly reduced. Further, in this case, since atmospheric pressure is not applied to the airtight maintenance material 6 on the inner surface side of the reinforced concrete part 5, the number of fixing fittings for fixing the airtightness maintenance material on the inner surface side can be reduced compared to the case of FIG. 2.
第４図に示したように鉄筋コンクリート部５の
外面に気密保持材６を配置した場合には、この気
密保持材によりチヤンバ内の気密が保てるので、
内面側の気密保持材を省略できる。しかし内面側
の気密保持材を省略した場合には、鉄筋コンクリ
ート内に吸収されている空気その他のガスを完全
に吸引し終るまでにかなりの時間を要し、作業性
に問題が生じるのでできれば図示のように鉄筋コ
ンクリート部５の内面側にも気密保持材６を配設
することが望ましい。 When an airtight material 6 is placed on the outer surface of the reinforced concrete part 5 as shown in FIG. 4, the airtightness inside the chamber can be maintained by this airtight material.
The airtight material on the inner surface can be omitted. However, if the airtight material on the inner surface is omitted, it will take a considerable amount of time to completely suck out the air and other gases absorbed in the reinforced concrete, which will cause problems with workability. It is desirable to arrange the airtightness maintaining material 6 on the inner surface side of the reinforced concrete part 5 as well.
本発明の真空チヤンバの形状は任意であり、被
加工物の形状に応じて適宜の形状に形成すること
ができる。例えば第５図に示したように、被加工
物２２が鋼管の場合には、真空チヤンバ本体１の
横断面の形状をアーチ形とすることができる。第
５図の実施例では内部を真空にした場合に側壁１
ａの下方部に大きな荷重がかかるので、この下方
部の鉄筋コンクリートの厚みを大にする必要があ
るが、側壁の上部には下方部程大きな荷重がかか
らないのでその厚みを比較的小さくすることがで
きる。第５図において気密保持材６は鋼板等の金
属板または合成樹脂からなり、側壁１ａ及び底壁
１ｂの鉄筋コンクリート部の内面に付着されてい
る。底壁１ｂの上にはレール２３，２３が配設さ
れ、これらのレールには被加工物２２を回転させ
るターニングローラ２４を搭載した台車２５の車
輪が係合している。電子銃２０は真空チヤンバ本
体１の頂部に取付けてあり、ターニングローラ２
４及び台車２５により被加工物２２を電子銃に対
して相対的に変位させつつ加工を行なうようにな
つている。 The shape of the vacuum chamber of the present invention is arbitrary and can be formed into an appropriate shape depending on the shape of the workpiece. For example, as shown in FIG. 5, when the workpiece 22 is a steel pipe, the cross-sectional shape of the vacuum chamber body 1 can be arched. In the embodiment shown in FIG. 5, when the inside is evacuated, the side wall 1
Since a large load is applied to the lower part of a, it is necessary to increase the thickness of the reinforced concrete in this lower part, but since the upper part of the side wall does not receive as much load as the lower part, its thickness can be made relatively small. . In FIG. 5, the airtight retaining material 6 is made of a metal plate such as a steel plate or a synthetic resin, and is attached to the inner surface of the reinforced concrete portion of the side wall 1a and the bottom wall 1b. Rails 23, 23 are arranged on the bottom wall 1b, and wheels of a truck 25 on which a turning roller 24 for rotating the workpiece 22 is mounted are engaged with these rails. The electron gun 20 is attached to the top of the vacuum chamber body 1, and the turning roller 2
4 and a cart 25, the workpiece 22 is processed while being displaced relative to the electron gun.
上記合各実施例の真空チヤンバを用いた電子ビ
ーム加工の順序及び操作内容は通常の鋼板製の真
空チヤンバを使用した電子ビーム加工のそれと同
様であるので説明は省略する。 The order and operation details of electron beam processing using a vacuum chamber in each of the above embodiments are the same as those of electron beam processing using a normal vacuum chamber made of a steel plate, so a description thereof will be omitted.
本発明のように真空チヤンバの主要部を鉄筋コ
ンクリートで製作すると大形の真空チヤンバの製
作が可能になるだけでなく、真空チヤンバの価格
を下げることができる。例えば、長さ数十メート
ル、管外径十数メートル、厚みが数百ミリの超大
形鋼管を加工する真空チヤンバを第５図に示すよ
うに構成した場合、全体を鋼板で製作したと仮定
した場合の価格の約1/10の価格で製作することが
できる。 If the main part of the vacuum chamber is made of reinforced concrete as in the present invention, not only can a large-sized vacuum chamber be manufactured, but also the price of the vacuum chamber can be reduced. For example, if a vacuum chamber for processing an ultra-large steel pipe with a length of several tens of meters, an outer diameter of more than ten meters, and a thickness of several hundred millimeters is configured as shown in Figure 5, it is assumed that the entire structure is made of steel plate. It can be manufactured at about 1/10 the price of the case.
以上のように、本発明によれば、従来事実上製
作することができなかつた超大形の被加工物を収
納する全真空チヤンバを製作することができ、電
子ビーム加工の深溶込能力を十分に発揮させて効
率的に高品質の加工結果を得ることができる。ま
た鉄筋コンクリートからなるチヤンバの主要部に
は、Ｘ線を遮蔽するための鉛板を設ける必要がな
く、また鉄筋コンクリートは安価な上に施工も容
易であるので、真空チヤンバを製作する際に要す
る労力及び経済的負担を大幅に減少させることが
できる。 As described above, according to the present invention, it is possible to manufacture a fully vacuum chamber that accommodates an extremely large workpiece, which has been practically impossible to manufacture in the past, and to fully utilize the deep penetration capability of electron beam machining. This makes it possible to efficiently obtain high-quality machining results. In addition, there is no need to install lead plates to shield X-rays in the main parts of the chamber made of reinforced concrete, and since reinforced concrete is inexpensive and easy to construct, it reduces the labor and labor required to manufacture a vacuum chamber. The economic burden can be significantly reduced.
尚本発明は被加工物が大形になる程有利となる
が、小形の被加工物の電子ビーム加工に用いる真
空チヤンバにも本発明を適用できるのは勿論であ
る。 Although the present invention becomes more advantageous as the workpiece becomes larger, it goes without saying that the present invention can also be applied to vacuum chambers used for electron beam processing of small workpieces.
第１図は、本発明の真空チヤンバの一実施例を
示す概略正面図、第２図は第１図のＡ―Ａ線断面
図、第３図及び第４図はそれぞれ本発明の他の異
なる実施例の一部を示す断面図、第５図は本発明
の更に他の実施例を示す横断面図である。
１…真空チヤンバ本体、２…扉、３…鉄筋、４
…コンクリート、５，５′び…鉄筋コンクリート
部、６，６′…気密保持材、７…固定金具、９，
９′，１４，１４′…補強材。
FIG. 1 is a schematic front view showing one embodiment of the vacuum chamber of the present invention, FIG. 2 is a sectional view taken along the line A--A in FIG. 1, and FIGS. FIG. 5 is a cross-sectional view showing a part of the embodiment, and FIG. 5 is a cross-sectional view showing still another embodiment of the present invention. 1...Vacuum chamber body, 2...Door, 3...Reinforcing bar, 4
...Concrete, 5,5'...Reinforced concrete part, 6,6'...Airtight maintenance material, 7...Fixing metal fittings, 9,
9', 14, 14'...Reinforcement material.
Claims (1)
子ビーム加工用真空チヤンバにおいて、前記真空
チヤンバの主要部が鉄筋コンクリートにより形成
され、前記鉄筋コンクリートの外周面及び内周面
の少なくとも一方に気密保持部材が付着されてい
ることを特徴とする電子ビーム加工用真空チヤン
バ。 ２ 前記気密保持材が金属板であることを特徴と
する特許請求の範囲第１項に記載の電子ビーム加
工用真空チヤンバ。 ３ 前記気密保持材が合成樹脂であることを特徴
とする特許請求の範囲第１項に記載の電子ビーム
加工用真空チヤンバ。 ４ 前記気密保持材は、一端が前記鉄筋コンクリ
ート内に埋設された固定金具の他端に固着された
金属板であることを特徴とする特許請求の範囲第
１項に記載の電子ビーム加工用真空チヤンバ。[Scope of Claims] 1. In a vacuum chamber for electron beam processing in which a workpiece is housed and processed by an electron beam, a main part of the vacuum chamber is formed of reinforced concrete, and at least one of an outer circumferential surface and an inner circumferential surface of the reinforced concrete A vacuum chamber for electron beam processing, characterized in that an airtight maintenance member is attached to the vacuum chamber. 2. The vacuum chamber for electron beam processing according to claim 1, wherein the airtight maintaining material is a metal plate. 3. The vacuum chamber for electron beam processing according to claim 1, wherein the airtight maintaining material is a synthetic resin. 4. The vacuum chamber for electron beam machining according to claim 1, wherein the airtight retaining material is a metal plate having one end fixed to the other end of the fixing fitting buried in the reinforced concrete. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5122677A JPS53137499A (en) | 1977-05-06 | 1977-05-06 | Vacuum chamber for use in electron beam working |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5122677A JPS53137499A (en) | 1977-05-06 | 1977-05-06 | Vacuum chamber for use in electron beam working |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53137499A JPS53137499A (en) | 1978-11-30 |
| JPS6114918B2 true JPS6114918B2 (en) | 1986-04-21 |
Family
ID=12881020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5122677A Granted JPS53137499A (en) | 1977-05-06 | 1977-05-06 | Vacuum chamber for use in electron beam working |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53137499A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0423444Y2 (en) * | 1987-11-13 | 1992-06-01 |
-
1977
- 1977-05-06 JP JP5122677A patent/JPS53137499A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0423444Y2 (en) * | 1987-11-13 | 1992-06-01 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53137499A (en) | 1978-11-30 |
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