JPS61149029U - - Google Patents
Info
- Publication number
- JPS61149029U JPS61149029U JP3064385U JP3064385U JPS61149029U JP S61149029 U JPS61149029 U JP S61149029U JP 3064385 U JP3064385 U JP 3064385U JP 3064385 U JP3064385 U JP 3064385U JP S61149029 U JPS61149029 U JP S61149029U
- Authority
- JP
- Japan
- Prior art keywords
- air
- guide plate
- cleaning area
- utility
- purifying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims 1
- 238000007664 blowing Methods 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3064385U JPH0230659Y2 (sv) | 1985-03-04 | 1985-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3064385U JPH0230659Y2 (sv) | 1985-03-04 | 1985-03-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61149029U true JPS61149029U (sv) | 1986-09-13 |
| JPH0230659Y2 JPH0230659Y2 (sv) | 1990-08-17 |
Family
ID=30530527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3064385U Expired JPH0230659Y2 (sv) | 1985-03-04 | 1985-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230659Y2 (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004031928A (ja) * | 2002-05-07 | 2004-01-29 | Seiko Epson Corp | 清浄作業台 |
-
1985
- 1985-03-04 JP JP3064385U patent/JPH0230659Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004031928A (ja) * | 2002-05-07 | 2004-01-29 | Seiko Epson Corp | 清浄作業台 |
| JP4513275B2 (ja) * | 2002-05-07 | 2010-07-28 | セイコーエプソン株式会社 | 清浄作業台 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0230659Y2 (sv) | 1990-08-17 |