JPS6114760Y2 - - Google Patents

Description

[Detailed description of the invention] The present invention relates to a telescoping drive device used when, for example, oxidizing and diffusing silicon wafers, the silicon wafer is moved in and out of an electric furnace at a low and constant speed. The object of the present invention is to provide a telescopic drive device which has a large expansion/contraction ratio when the electric furnace is moved, and which has one end fixed to the body and the other end being a free end, so that it can be moved freely into and out of an electric furnace. .

The telescopic drive device of the present invention has a plurality of hollow feed screws with different diameters, each having a male thread on the outer periphery and a female thread on the inner periphery, and inserting the smaller diameter feed screw inside the larger diameter feed screw. A feed screw unit is constructed by rotatably screwing each feed screw together, and a feed screw unit is constructed by connecting multiple hollow cylinders with different diameters so that they cannot rotate in the circumferential direction but can slide only in the axial direction. Insert it inside the configured telescopic pipe unit, screw the outermost feed screw of the feed screw unit into the innermost hollow cylinder of the pipe unit, fix the outermost hollow cylinder to the fuselage, and By rotating the feed screw with a drive device, the entire telescopic rod consisting of the feed screw unit and the pipe unit is expanded and contracted in the axial direction.

First, the telescopic rod of the present invention will be explained with reference to FIGS. 1 to 6. FIG. 1 shows the telescopic rod in its contracted state, and FIG. 2 shows it in its extended state. The telescopic rod is roughly divided into a feed screw unit and a pipe unit. The feed screw unit is
It consists of five feed screws: a feed screw 1 serving as a drive shaft, and feed screws 2, 3, 4, and 5 driven by the feed screw 1. As shown in FIG. 3, the feed screw 1 consists of a bearing portion 1a, a trapezoidal male threaded portion 1b, and a straight guide portion 1c. Further, the feed screw 2 (same as the feed screws 3, 4, and 5) is a hollow shaft, and the outer periphery consists of a trapezoidal male threaded portion 2a and a straight guide portion 2b, and the inner surface of one end is thick and has a trapezoidal female threaded portion 2c there. It is being This thick part is located at the collar 6 as shown in Figure 4.
(The collars 7, 8, 9 correspond to the feed screws 3, 4, 5.) A groove 6a is provided on the outer periphery of the feed screw 2 (the feed screws 3, 4, 5 are also the same). It is inserted into the stepped inner surface of the tube and then heated and brazed to secure it. The step 2d caused by this collar 6 (same for collars 7, 8, and 9) is
When the telescopic rod extends, it hits the step 1d of the feed screw 1 (or feed screws 2, 3, 4) and the feed screw 2
(or the feed screws 3, 4, and 5). Furthermore, feed screw 2 (or feed screw 3, 4, 5)
A C-shaped retaining ring 10 (or 1
1, 12, 13) are installed. This means that when the telescopic rod contracts, the feed screw 1 (or 2, 3,
4), the end face 1e of this C-shaped retaining ring 10 (or 1
1, 12, 13) and feed screw 2 (or 3,
4 and 5).

The trapezoidal male thread 1b of the feed screw 1 and the trapezoidal female thread 2c of the feed screw 2 are meshed with each other, and the straight guide portion 1c of the feed screw 1 and the inner surface of the feed screw 2 are slidably fitted together. Furthermore, feed screw 2 and feed screw 3, feed screw 3 and feed screw 4, and feed screw 4
and the feed screw 5 are also combined in the same manner to form a feed screw unit.

Next, the pipe unit consists of a pipe 14 which is the main body of the telescopic unit, pipes 15, 16, 17, 18, 19 and a cap 20 which expand and contract as the feed screw expands and contracts. As shown in FIG. 5, grooves 15a and 15b are provided on the outer periphery of the pipe 15 (pipes 16 to 19 as well), and Teflon sheets 21 and 22 (pipes 16 to 19 also have Teflon sheets 21 and 22 in them). 23 to 30), and pipe 1
4 to 18 to ensure smooth sliding. In addition, each of the pipes 15 to 19 is provided with a slit 15c closed at both ends, so that each of the outer pipes 14 to 1
Pins 31 to 35 are attached from 8 to regulate the rotation and expansion/contraction positions of each pipe. Furthermore, as shown in FIG. 6, the inner side of one end of the pipe 19 at the tip is thick like the feed screws 2 to 5 and has a trapezoidal female thread 19a, which meshes with the trapezoidal male thread 5a of the feed screw 5 to form a trapezoidal female thread 19a similar to the feed screw. Perform the action. A cap 20 is attached to the tip of the pipe 19, and serves as a stopper for the feed screw 5.

As shown in FIGS. 1 and 2, a feed screw stopper 36, thrust bearings 37, 38, 39, a drive gear 40, and lock nuts 41, 42 are attached to the bearing portion 1a of the feed screw 1.
It is supported by radial bearings 45 and 46 attached to housings 43 and 44 attached to the housings 4 and 4, respectively. Further, the pipe 14 is provided with a notch 14a for installing an idler gear 116, which will be described later and meshes with the drive gear 40, into the pipe 14.

Next, the operation of the above-mentioned telescopic rod will be explained. The telescopic rod has a plurality of pipes 14 to
19 are slidably fitted into each other, and a plurality of feed screws 1 to 5 are screwed into each other and inserted inside thereof. When the drive gear 40 rotates by the drive mechanism described later and the feed screw rotates in the CW direction, since the rotation of the outer pipes 14 to 19 is restricted, any of the feed screws 2, 3, 4, and 5 or the pipe 19 will rotate. It advances by the feed of the trapezoidal screw. For example, taking the feed screw 2 as an example, the trapezoidal male thread of the feed screw 1 and the trapezoidal female thread of the feed screw 2 cause the feed screw 2 to advance, as shown in FIG.
When it hits the stepped portion 2d on the inner surface of the feed screw 2, the advance of the feed screw 2 stops and starts rotating together with the feed screw 1. The feed screws 3, 4, 5 and the pipe 19 also perform the same operation as the feed screw 2 one after another in random order, and the expansion progresses.

The pipe unit also extends in parallel with the extension of the feed screw unit. That is, since the trapezoidal male thread of the feed screw 5 and the trapezoidal female thread of the pipe 19 mesh, when the feed screw unit advances, the pipe 19
also steps forward. Then, as shown in Figure 6, pipe 1
When one end 19b of the slit 9 hits the pin 35 attached to the pipe 18, the pipe 18 connects to the pipe 19.
step forward together. In this way, the pipe units advance one after another, and the extension stops in the state shown in FIG. 2 in which all the feed screw units have advanced.

Next, during contraction, when the feed screw 1 rotates in the CCW direction, any one of the feed screws 2, 3, 4, 5, or the pipe 19 begins to return. For example, if we take the feed screw 2 as an example, it is fed in the opposite direction to the case where it is extended by the trapezoidal male thread of the feed screw 1 and the trapezoidal female thread of the feed screw 2, and the tip end surface 1e of the feed screw is attached to the feed screw 2. When it hits the C-shaped retaining ring 10, the feed of the feed screw 2 stops and starts rotating together with the feed screw 1. The feed screws 3, 4, 5 and the pipe 19 also perform the same operation as the feed screw 2 one after another in random order, and the contraction progresses. The contraction of the pipe unit progresses in parallel with the contraction of the feed screw unit. That is, first, the pipe 19 returns, and when the other end 19c of the slit of the pipe 19 shown in FIG. 6 hits the pin 35 attached to the pipe 18, the pipe 18 returns together with the pipe 19. In this way, the pipe units are sequentially contracted, and the contraction of the telescopic rod is completed when all the feed screw units are contracted.

Next, with reference to FIGS. 7, 8, and 9, we will explain the power unit and drive unit that rotates the innermost feed screw 1 of the above-mentioned telescoping rod, and the position regulation that regulates the extended and retracted positions of the telescoping rod. Let me explain about the section. First of all, the power unit and drive section, the board 4
Motor mounting plates 62 and 63 having a motor 64 and a gear head 65 are attached to the motor 7. A torque limiter consisting of a hub 67, a friction plate 68, a washer 69, and adjusting nuts 70, 71 is attached to the gear head output shaft 66, and has a timing pulley 72. Normally, the timing pulley rotates together with the hub 67 due to the frictional force between the hub 67 and the friction plate 68, and transmits rotation to the driven side, but when an overload occurs on the driven side, the timing pulley 72 slips and rotates. is not transmitted to the driven side. The rotation of the timing pulley 72 is transmitted via a timing belt 73 to a timing pulley 75 attached to a shaft 74 shown in FIG. The shaft 74 is the base plate 4
It is supported by radial bearings 78, 79 in a housing 77 attached to 7, and has a speed converting gear 80. A speed conversion gear 81 attached to the shaft 93 supported by the housing 77 and the housing 97 by radial bearings 94 and 98 is responsible for speed conversion of the telescopic rod together with the speed conversion gear 80. speed conversion gear 80,
81 each has two gears integrated through a boss part, E-shaped retaining rings 82, 83, pin 84,
85 and lock screws 86 and 87, and four speed conversions can be performed by changing the gear combination. Note that this operation can be performed from the outside via a door 88 provided on the rear plate 51. 89 is the door lock screw, 90
is a door stopper, and 91 and 92 are hinges. A gear 96 is attached to the shaft 93 and transmits the rotation after speed conversion to the drive gear 40 in the telescopic rod via the idler gear 116. Idler gear 1
16 is held by an idler shaft 117 attached to an idler mount 115. 118, 11
9 is a spacer, and 120 is an E-shaped retaining ring.

The idler mounting base 115 is provided with an arcuate slit 115a centered approximately on the center of the gear 96, and when inserting and removing the telescopic rod, the idler shaft 117 is slid along this slit to facilitate insertion and removal. There is. Also, the distance between the centers of the gear 96, idler gear 116, and drive gear 40 is adjusted. The telescopic rods are clamped by telescopic rod holders 121, 122 attached to the front plate 50 and rear plate 51.

Next, regarding the position control section, the shaft 93 is provided with a threaded section, and a moving plate 99 having a female thread that engages with this thread is attached. When the shaft 93 rotates, the guide shaft 112 attached to the housings 77, 97 restricts the rotation of the movable plate 99, so that the movable plate 99 is moved by the screw. The moving speed of the moving plate 99 is set to 4/1 of the speed of the telescopic rod due to the relationship between the pitch and rotation speed of the screw provided on the shaft 93 and the feed screw, so the stroke is set on a scale of 4/1 of the stroke of the telescopic rod. Can be done. Further, a limit switch operating plate 100 is attached to the moving plate 99, and operates limit switches 101, 102 attached to limit switch mounting plates 103, 104. Limit switch mounting plates 103 and 104 are spacers 10
Stroke setting is performed by sliding on a guide plate 107 attached to the side plate 49 via 5 and 106. 108, 109 are lock screws, 110,
111 is an E-shaped retaining ring.

A switch 57, a fuse 58, neo lamps 59 and 60, and a metal outlet 61 are attached to the front plate 50 to constitute an operating section. Also, the board 47
includes a capacitor 53, a terminal board 54, a relay 55,
56 is installed. Side plates 48, 49, front plate 5
0, the rear plate 51 is attached to the base plate 47, and the upper cover 5
2 constitutes the exterior of this device.

As described above, in the present invention, a feed screw unit constituted by a plurality of feed screws screwed together is fitted inside a pipe unit in which a plurality of hollow cylinders are slidably engaged only in the axial direction. By rotating the innermost feed screw, the feed screw rotates while being supported by the pipe unit whose rotation is suppressed, causing the feed screw unit and the pipe unit to expand and contract. Since it is a free end with no support, for example, a silicon wafer or the like can be mounted here and the wafer can be freely moved in and out of the electric furnace without providing a guide section inside the furnace. In addition, by increasing the number of feed screws constituting the feed screw unit and the number of pipes in the pipe unit, the expansion/contraction ratio between contraction and expansion can be increased, making it possible to create a compact telescopic drive device with a large travel distance (stroke). Obtainable.

[Brief explanation of the drawing]

The figures show an embodiment of the present invention. Figure 1 is a side sectional view of the telescopic rod in a retracted state, Figure 2 is a side sectional view of the telescopic rod in an extended state, and Figure 3 is a feed screw unit of the telescopic rod. Figure 4 is an enlarged view of a part of the feed screw of the telescopic rod, Figure 5 is a view of a part of the pipe unit of the telescopic rod, and Figure 6 is a diagram showing the tip of the feed screw and the pipe. 7 is a front view of the whole, FIG. 8 is a plan view, and FIG. 9 is a side view. 1... Drive shaft, 2, 3, 4, 5... Feed screw,
14-19...Pipe, 40...Drive gear, 99
...Moving board, 101,102...Limit switch.

Claims (1)

[Scope of Claim for Utility Model Registration] 1. A plurality of hollow feed screws having male threads on the outer periphery and female threads on the inner periphery and having different diameters are inserted adjacent to each other by inserting a small diameter feed screw inside the large diameter feed screw. a feed screw group in which feed screws are rotatably screwed together; a feed screw regulating means provided on the feed screw and regulating the amount of relative axial movement with an adjacent feed screw; and a plurality of feed screws having different diameters. A group of hollow cylinders concentrically arranged such that they cannot rotate in the circumferential direction but can slide only in the axial direction, and an axis provided in each hollow cylinder and relative to the adjacent hollow cylinder. a hollow cylinder regulating means for regulating the amount of movement in the direction; a female screw provided in the innermost hollow cylinder of the hollow cylinder group and screwed into the male thread of the outermost feed screw of the feed screw group; a third regulating means provided in a hollow cylinder for regulating the amount of movement in the axial direction relative to the outermost feed screw; the feed screw group is inserted inside the hollow cylinder group; The male thread of the outermost feed screw is screwed into the female thread of the innermost hollow cylinder, the outermost hollow cylinder is fixed to the fuselage, and each feed screw and the hollow cylinder are connected by rotating the innermost feed screw. A telescopic drive device characterized in that it extends or contracts by moving in the same direction. 2. Practical use characterized in that the feed screw regulating means is provided on the inner and outer peripheries of the feed screws and is constituted by steps that mutually engage with feed screws adjacent to each feed screw. A telescopic drive device according to claim 1 of the patent registration claim. 3. The telescopic drive device according to claim 1, wherein the feed screw regulating means is constituted by a retaining ring attached to one end of the inner periphery of the feed screw. 4. The hollow cylinder regulating means includes a slit that is closed at both ends provided in each hollow cylinder of the hollow cylinder group, and a pin that is provided in a hollow cylinder adjacent to the outside of the hollow cylinder and engages with the slit. The telescopic drive device according to claim 1, characterized in that the telescopic drive device is constructed as follows.