JPS61147262U - - Google Patents
Info
- Publication number
- JPS61147262U JPS61147262U JP3032285U JP3032285U JPS61147262U JP S61147262 U JPS61147262 U JP S61147262U JP 3032285 U JP3032285 U JP 3032285U JP 3032285 U JP3032285 U JP 3032285U JP S61147262 U JPS61147262 U JP S61147262U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- sputtering
- integrated
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3032285U JPH0213483Y2 (https=) | 1985-03-05 | 1985-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3032285U JPH0213483Y2 (https=) | 1985-03-05 | 1985-03-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61147262U true JPS61147262U (https=) | 1986-09-11 |
| JPH0213483Y2 JPH0213483Y2 (https=) | 1990-04-13 |
Family
ID=30529916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3032285U Expired JPH0213483Y2 (https=) | 1985-03-05 | 1985-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213483Y2 (https=) |
-
1985
- 1985-03-05 JP JP3032285U patent/JPH0213483Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0213483Y2 (https=) | 1990-04-13 |