JPS61147262U - - Google Patents

Info

Publication number
JPS61147262U
JPS61147262U JP3032285U JP3032285U JPS61147262U JP S61147262 U JPS61147262 U JP S61147262U JP 3032285 U JP3032285 U JP 3032285U JP 3032285 U JP3032285 U JP 3032285U JP S61147262 U JPS61147262 U JP S61147262U
Authority
JP
Japan
Prior art keywords
ion beam
sputtering
integrated
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3032285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213483Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3032285U priority Critical patent/JPH0213483Y2/ja
Publication of JPS61147262U publication Critical patent/JPS61147262U/ja
Application granted granted Critical
Publication of JPH0213483Y2 publication Critical patent/JPH0213483Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3032285U 1985-03-05 1985-03-05 Expired JPH0213483Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3032285U JPH0213483Y2 (enrdf_load_stackoverflow) 1985-03-05 1985-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3032285U JPH0213483Y2 (enrdf_load_stackoverflow) 1985-03-05 1985-03-05

Publications (2)

Publication Number Publication Date
JPS61147262U true JPS61147262U (enrdf_load_stackoverflow) 1986-09-11
JPH0213483Y2 JPH0213483Y2 (enrdf_load_stackoverflow) 1990-04-13

Family

ID=30529916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3032285U Expired JPH0213483Y2 (enrdf_load_stackoverflow) 1985-03-05 1985-03-05

Country Status (1)

Country Link
JP (1) JPH0213483Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0213483Y2 (enrdf_load_stackoverflow) 1990-04-13

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