JPS61146948U - - Google Patents
Info
- Publication number
- JPS61146948U JPS61146948U JP3051485U JP3051485U JPS61146948U JP S61146948 U JPS61146948 U JP S61146948U JP 3051485 U JP3051485 U JP 3051485U JP 3051485 U JP3051485 U JP 3051485U JP S61146948 U JPS61146948 U JP S61146948U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- passage
- alignment tool
- groove
- counting alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985030514U JPH0650986Y2 (ja) | 1985-03-04 | 1985-03-04 | ウエハカウント装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985030514U JPH0650986Y2 (ja) | 1985-03-04 | 1985-03-04 | ウエハカウント装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61146948U true JPS61146948U (da) | 1986-09-10 |
| JPH0650986Y2 JPH0650986Y2 (ja) | 1994-12-21 |
Family
ID=30530279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985030514U Expired - Lifetime JPH0650986Y2 (ja) | 1985-03-04 | 1985-03-04 | ウエハカウント装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650986Y2 (da) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60136142U (ja) * | 1984-02-20 | 1985-09-10 | 九州日本電気株式会社 | 半導体基板の収納箱 |
-
1985
- 1985-03-04 JP JP1985030514U patent/JPH0650986Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60136142U (ja) * | 1984-02-20 | 1985-09-10 | 九州日本電気株式会社 | 半導体基板の収納箱 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0650986Y2 (ja) | 1994-12-21 |