JPS61145936U - - Google Patents
Info
- Publication number
- JPS61145936U JPS61145936U JP1985028524U JP2852485U JPS61145936U JP S61145936 U JPS61145936 U JP S61145936U JP 1985028524 U JP1985028524 U JP 1985028524U JP 2852485 U JP2852485 U JP 2852485U JP S61145936 U JPS61145936 U JP S61145936U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- reticle
- top surface
- insertion pins
- attach
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000037431 insertion Effects 0.000 claims description 5
- 238000003780 insertion Methods 0.000 claims description 5
- 239000012790 adhesive layer Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims 1
- 239000000428 dust Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985028524U JPS6344824Y2 (US20100268047A1-20101021-C00003.png) | 1985-02-28 | 1985-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985028524U JPS6344824Y2 (US20100268047A1-20101021-C00003.png) | 1985-02-28 | 1985-02-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61145936U true JPS61145936U (US20100268047A1-20101021-C00003.png) | 1986-09-09 |
| JPS6344824Y2 JPS6344824Y2 (US20100268047A1-20101021-C00003.png) | 1988-11-21 |
Family
ID=30526478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985028524U Expired JPS6344824Y2 (US20100268047A1-20101021-C00003.png) | 1985-02-28 | 1985-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6344824Y2 (US20100268047A1-20101021-C00003.png) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014228868A (ja) * | 2013-05-21 | 2014-12-08 | 上海和輝光電有限公司Ｅｖｅｒｄｉｓｐｌａｙ Ｏｐｔｒｏｎｉｃｓ （Ｓｈａｎｇｈａｉ） Ｌｉｍｉｔｅｄ | ペリクルフレーム、フォトマスク、及びその取り付け方法 |
| WO2016043301A1 (ja) * | 2014-09-19 | 2016-03-24 | 三井化学株式会社 | ペリクル、ペリクルの製造方法及びペリクルを用いた露光方法 |
| JP2017534077A (ja) * | 2014-11-17 | 2017-11-16 | エーエスエムエル ネザーランズ ビー．ブイ． | マスクアセンブリ |
| US10488751B2 (en) | 2014-09-19 | 2019-11-26 | Mitsui Chemicals, Inc. | Pellicle, production method thereof, exposure method |
| US10642151B2 (en) * | 2014-11-04 | 2020-05-05 | Nippon Light Metal Company, Ltd. | Pellicle support frame and production method |
| JP2020122975A (ja) * | 2015-02-03 | 2020-08-13 | エーエスエムエル ネザーランズ ビー．ブイ． | マスクアセンブリ及び関連する方法 |
-
1985
- 1985-02-28 JP JP1985028524U patent/JPS6344824Y2/ja not_active Expired
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014228868A (ja) * | 2013-05-21 | 2014-12-08 | 上海和輝光電有限公司Ｅｖｅｒｄｉｓｐｌａｙ Ｏｐｔｒｏｎｉｃｓ （Ｓｈａｎｇｈａｉ） Ｌｉｍｉｔｅｄ | ペリクルフレーム、フォトマスク、及びその取り付け方法 |
| WO2016043301A1 (ja) * | 2014-09-19 | 2016-03-24 | 三井化学株式会社 | ペリクル、ペリクルの製造方法及びペリクルを用いた露光方法 |
| JPWO2016043301A1 (ja) * | 2014-09-19 | 2017-06-29 | 三井化学株式会社 | ペリクル、ペリクルの製造方法及びペリクルを用いた露光方法 |
| US10488751B2 (en) | 2014-09-19 | 2019-11-26 | Mitsui Chemicals, Inc. | Pellicle, production method thereof, exposure method |
| US10585348B2 (en) | 2014-09-19 | 2020-03-10 | Mitsui Chemicals, Inc. | Pellicle, pellicle production method and exposure method using pellicle |
| US10642151B2 (en) * | 2014-11-04 | 2020-05-05 | Nippon Light Metal Company, Ltd. | Pellicle support frame and production method |
| US10558129B2 (en) | 2014-11-17 | 2020-02-11 | Asml Netherlands B.V. | Mask assembly |
| US10539886B2 (en) | 2014-11-17 | 2020-01-21 | Asml Netherlands B.V. | Pellicle attachment apparatus |
| JP2017534077A (ja) * | 2014-11-17 | 2017-11-16 | エーエスエムエル ネザーランズ ビー．ブイ． | マスクアセンブリ |
| US10969701B2 (en) | 2014-11-17 | 2021-04-06 | Asml Netherlands B.V. | Pellicle attachment apparatus |
| US11003098B2 (en) | 2014-11-17 | 2021-05-11 | Asml Netherlands B.V | Pellicle attachment apparatus |
| US11009803B2 (en) | 2014-11-17 | 2021-05-18 | Asml Netherlands B.V. | Mask assembly |
| JP2020122975A (ja) * | 2015-02-03 | 2020-08-13 | エーエスエムエル ネザーランズ ビー．ブイ． | マスクアセンブリ及び関連する方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6344824Y2 (US20100268047A1-20101021-C00003.png) | 1988-11-21 |
