JPS61144030A - Semiconductor device assembling machine - Google Patents
Semiconductor device assembling machineInfo
- Publication number
- JPS61144030A JPS61144030A JP26674484A JP26674484A JPS61144030A JP S61144030 A JPS61144030 A JP S61144030A JP 26674484 A JP26674484 A JP 26674484A JP 26674484 A JP26674484 A JP 26674484A JP S61144030 A JPS61144030 A JP S61144030A
- Authority
- JP
- Japan
- Prior art keywords
- magazine
- frame
- empty
- supply
- arrow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
Abstract
Description
【発明の詳細な説明】
〔゛産業上の利用分野〕
本発明は゛リード少し−ムを使用した半導体装置の組立
装置に関し、特にリードフレームの供給卦よび収納機構
を自動化した半導体装置の組立装置に関する′ものであ
る。 −〔従来の技術〕
半導体装置の組立工aは、リードフレームと鉢ばれる金
属板(以下単にフレームという)上に半導体ベレットを
載置し、結線し、封入し、整形し、捺印する等の諸工程
からなる。こnらの工程でに多ぐの場合、フレームはマ
ガジンケース(以下単にマガジンという)から供給され
、再びマガジン内に収納部れ机第5図はその原理図であ
る。すなわち、作業前フレーム5aは、フレーム供給部
lに装着された供給用マガジン(以下作業前マガジン2
という)エリ二枚ずつ作業ステージ6に供給され、所定
の組立作業が施された後に、作業済フレーム5bとして
フレーム収納部3に装着された収納用マガジン(以下作
業済マガジン4という)の中に一枚fつ収納されてゆく
。本図において、フレーム供給部lは図示しないモータ
、ねじ等の機構により一段ずつ下降し、フレーム収納部
3は一段ずつ上昇してフレームの供給・収納を一枚ずつ
行っている。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor device assembly apparatus using a lead frame, and more particularly to a semiconductor device assembly apparatus in which a lead frame feeding and storage mechanism is automated. 'It's a thing. - [Prior Art] A semiconductor device assembler a places a semiconductor pellet on a metal plate (hereinafter simply referred to as frame) that is fitted with a lead frame, connects it, encapsulates it, shapes it, stamps it, etc. Consists of processes. In many cases in these processes, the frame is supplied from a magazine case (hereinafter simply referred to as magazine) and then stored again in the magazine. FIG. 5 is a diagram showing its principle. That is, the pre-work frame 5a is connected to a supply magazine (hereinafter referred to as pre-work magazine 2) attached to the frame supply section l.
After the frames are fed two by two to the work stage 6 and subjected to the predetermined assembly work, they are placed in a storage magazine (hereinafter referred to as the worked magazine 4) installed in the frame storage section 3 as a worked frame 5b. F pieces are stored one by one. In this figure, the frame supply section 1 is lowered step by step by a mechanism such as a motor and screws (not shown), and the frame storage section 3 is raised step by step to supply and store frames one by one.
従来、マガジンの交換と装着は作業者の手で行われてい
たため、フレーム供給部のマガジンが空になった場合、
Ihるいはフレーム収納部のマガジンが一杯になった場
合には装置を停止させ1作業者が新しいマガジンと交換
する必要があった。そのため装置の停止時間が無駄とな
り、生産性の低下を招いていた。Traditionally, magazines were replaced and installed manually by workers, so when the magazine in the frame supply section became empty,
Alternatively, when the magazine in the frame storage section became full, it was necessary to stop the device and replace the magazine with a new one by one worker. Therefore, the downtime of the equipment was wasted, leading to a decrease in productivity.
この問題を解決すべく、第6図の側面図に示すようなフ
レーム収納機構が用いられている。この収納機構は、ガ
イドシャツ)8Vc案内されて送りねじ9で上下する2
個のエレベータ7t−有し、送りねじ9は歯車11ff
i介してモータ10により回転する。そしてフレーム収
納作業中の作業済マガジy4aの他に空のマガジy4b
i保持することができる。作業済マガジ74aへの7レ
ーム収納が終了したのち、エアシリ/ダ12等の駆動源
によって機構全体が横方向へ移動し、空マガジy4bへ
の収納作業が開始される。作業者は空マガジン4bへの
収納作業中に作業済マガジy4at−新しい空のマガジ
ンと交換すれば装置1ハ停止することがない。In order to solve this problem, a frame storage mechanism as shown in the side view of FIG. 6 is used. This storage mechanism is guided by a guide shirt) 8Vc and moved up and down by a feed screw 9.
The elevator has 7t-, and the feed screw 9 has a gear 11ff.
It is rotated by a motor 10 via i. In addition to the completed magazine y4a that is being stored in the frame, the empty magazine y4b
i can hold. After the storage of 7 frames into the worked magazine 74a is completed, the entire mechanism is moved laterally by a drive source such as the air cylinder/dah 12, and the storage work into the empty magazine y4b is started. If the operator replaces the worked magazine y4at with a new empty magazine while storing it in the empty magazine 4b, the apparatus 1 will not stop.
□ しかしながら組立装置の高速化によってマガジン交
換の頻度が数分毎乙高くなってきたため、供給−におけ
る作業前マガジンの装着および空マガジンの回収、収納
側における空マガジンの装着および作業済マガジンの回
収に要する時間の比率が高まり、殊に一人の作業者が複
数の組立装置を操作する場合に作業能率の低下、時には
装置の停止などの事態を招くという欠点があった。□ However, as the speed of assembly equipment has increased, the frequency of replacing magazines every few minutes has increased, so it is necessary to install magazines before work and collect empty magazines at the supply side, and to install empty magazines and collect worked magazines at the storage side. The disadvantage is that the time required increases, and particularly when one worker operates a plurality of assembly devices, work efficiency decreases and sometimes the devices stop.
本発明の目的は、上記欠点を除去することによって作業
者のマガジン交換の工数を大幅に削減し。An object of the present invention is to significantly reduce the number of man-hours required for replacing magazines by eliminating the above drawbacks.
作業能率と生産性を向上させることができる半導体装置
の組立装WLt−提供することKある。An object of the present invention is to provide a semiconductor device assembly WLt that can improve work efficiency and productivity.
本発明は、フレーム供給部に作業前フレームを収納した
マガジンを供給する作業前マガジン供給機構と、同供給
部にてフレーム供給が終了した空マガジンを排出する空
マガジン排出機構と、フレーム収納部に空マガジンを供
給する空マガジン供給機構と、同収納部にてフレーム収
納が終了した作業済マガジンを排出する作業済マガジン
排出機構と、更に前述の空マガジン排出機構と空マガジ
ン供給機構とを連結する空マガジン搬送機構と金含んで
構成さnる半導体装置の組立装置である。The present invention provides a pre-work magazine supply mechanism that supplies a magazine containing pre-work frames to a frame supply section, an empty magazine discharge mechanism that discharges an empty magazine whose frames have been supplied from the supply section, and a frame storage section. An empty magazine supply mechanism that supplies empty magazines, a worked magazine discharge mechanism that discharges worked magazines whose frames have been stored in the same storage section, and the above-mentioned empty magazine discharge mechanism and empty magazine supply mechanism are connected. This is a semiconductor device assembly device including an empty magazine transport mechanism and a metal.
゛ 〔実施例〕 次に本発明を実施例を用い、図面を参照して説明する。゛ [Example] Next, the present invention will be explained using examples and with reference to the drawings.
第1図は本発明の一葵施例におけるフレーム供給部、フ
レーム収納部およびiガジ/の位置関係を説明するため
の斜視図である。FIG. 1 is a perspective view for explaining the positional relationship among a frame supply section, a frame storage section, and an i-gauge in an embodiment of the present invention.
第1図において、フレーム供給部1上には作業者によっ
て作業前のマガジン2が並置さnる。作業前マガジン2
は2作業前マガジン供給機構(図示せス)によってフレ
ーム供給部エレベータ13に供給される。矢印Aはその
間のマガジンの動きを示したものである。−万1作業前
のフレーム(図示せず)ハ、矢印りの如く作業前マガジ
ン2と共に搬送され、フレーム供給部エレベータ13の
下降に伴って作業前マガジy2mから矢印Eの如く一枚
ずつ引き出され、作業ステージ6上で所定の組立作業が
行われる。七6後矢印Fの如く、フレーム収納部エレベ
ータ14上の作業済マガジン4a内に一枚ずつ収納され
る。こうして供給部エレベータ13上の作業前マガジy
2aが空になり、収納部エレベータ14上の作業済叩ガ
ジ743への収納が終了した時点で、空の作業前マガジ
72aは、矢印Bの如く排出後搬送されて収納部エレベ
ータ14上に移り、空の作業済マガジ74mとなる。−
万、フレーム収納が終了した作業済マガジン4はフレー
ム収納部3の図示しない作業済マガジン排出機構により
、矢印Cの如く排出される。In FIG. 1, magazines 2 are juxtaposed on a frame supply section 1 by an operator before being worked on. Magazine 2 before work
is supplied to the frame supply section elevator 13 by a magazine supply mechanism (not shown) before the second operation. Arrow A shows the movement of the magazine during that time. - In the unlikely event that a frame before work (not shown) is transported together with the pre-work magazine 2 as shown by the arrow, it is pulled out one by one from the pre-work magazine y2m as shown by the arrow E as the frame supply elevator 13 descends. , predetermined assembly work is performed on the work stage 6. As shown by arrow F after 76, the sheets are stored one by one in the worked magazine 4a on the frame storage elevator 14. In this way, the magazine y before work on the supply section elevator 13 is
2a becomes empty and storage in the worked magazine 743 on the storage elevator 14 is completed, the empty unworked magazine 72a is discharged and conveyed as shown by arrow B and moved onto the storage elevator 14. , 74 m of empty and worked magazines. −
The worked magazine 4 whose frames have been stored is discharged as indicated by arrow C by a worked magazine discharge mechanism (not shown) of the frame storage section 3.
矢印Gは作業済フレームの搬送経路を示す。Arrow G indicates the transport path of the worked frame.
次に第1図実施例の機構の詳細について更に説明する。Next, details of the mechanism of the embodiment shown in FIG. 1 will be further explained.
第2図および第3図はそれぞれ同じ実施例の側面図、第
4図は同じく部分側面図である。2 and 3 are side views of the same embodiment, and FIG. 4 is a partial side view of the same embodiment.
第2図において1作業前のフレーム5aの入った作業前
マガジ72 ald供給部エレベータ13よ#Cあり%
マガジン押さえ17aおよびエアシリンダ18mによっ
て保持固定さnている。同様に作業済のフレーム5bO
t!いった作業済マガシ/4aは、収納部エレベータ1
4上にあり、マガジン押さえ17bおよびエアシリンダ
18bKよって保持固定されている。組立作業が進むに
つれて、モータ15aで駆動される送りねじ16aによ
ってフレーム供給部エレベータ13は下降し、モータ1
5bで駆動される送りねじ16bによってフレーム収納
部エレベータ14は上昇し、作業済フレーム5bは次第
に作業済マガジy4a内に収納されてゆく。In Fig. 2, the magazine 72 before work containing the frame 5a before the work, the ald supply section elevator 13, with #C%
It is held and fixed by the magazine holder 17a and the air cylinder 18m. Similarly worked frame 5bO
T! The completed work/4a is in the storage elevator 1.
4, and is held and fixed by the magazine holder 17b and the air cylinder 18bK. As the assembly work progresses, the frame supply elevator 13 is lowered by the feed screw 16a driven by the motor 15a, and the motor 1
The frame storage elevator 14 is raised by the feed screw 16b driven by the feed screw 5b, and the worked frame 5b is gradually stored in the worked magazine y4a.
作業前マガジン2aが空になると、マガジン押さえ17
aはマガジン2at−解放する。エレベータ13は下降
を続行して、マガジン辷り板26より低い位置まで下降
すると一時停止する。次いでエアシリンダ24によって
マガジン押出し板23が作動し、空になった作業前マガ
ジy2 ak供給部エレベータ13の外に排出する。こ
れが空マガジン排出機構である。When the pre-work magazine 2a is empty, the magazine holder 17
a releases magazine 2at-. The elevator 13 continues to descend, and when it descends to a position lower than the magazine sliding plate 26, it temporarily stops. Next, the magazine ejecting plate 23 is actuated by the air cylinder 24, and the empty magazine y2ak before work is discharged to the outside of the supply section elevator 13. This is the empty magazine ejection mechanism.
又、フレーム供給部lに並置された作業前マガジン2は
、エアシリンダ2QaKよりて摺動可能な作業済マガジ
ン供給桿19aに回転可能に取付けられたマガジン供給
爪21aに押さnるCとによって、フレーム供給部l上
を移動できる。これが作業前マガジン供給機構である。Further, the unworked magazines 2 juxtaposed in the frame supply section 1 are pushed by the magazine supply claw 21a rotatably attached to the slidable worked magazine supply rod 19a by the air cylinder 2QaK. It can move on the frame supply section l. This is the pre-operation magazine supply mechanism.
更に図示しない駆動源によって供給部エレベータ13の
上方に前もって移動していたフレーム供給部マガジン保
持台22aの上に、第3図に示すように新たな作業前マ
ガジン2が供給される。Further, as shown in FIG. 3, a new pre-operation magazine 2 is supplied onto the frame supply section magazine holding table 22a which has been previously moved above the supply section elevator 13 by a drive source (not shown).
−1、作業済のフレームを収納完了した作業済マガジン
4aH1収納部エレベータ14に保持されたまま上昇を
続け、エレベータの上限に達すると、図示しない駆動源
によってフレーム収納部マガジン保持台22bが、第3
図に示すように作業済マガジy4aの下に移動すると共
にマガジン押さえ17bが解放され、収納部エレベータ
14が下降を始めるため、作業済マガジy4Bは保持台
22b上に残る。次に、エアシリンダ20bによって摺
動可能な作業済マガジン排出桿19bが移動し、作業済
マガジン4aの排出準備をする。この時、供給部エレベ
ータ13は上昇中、収納部エレベータ14は下降中であ
るが、供給部マガジン保持台22a上の作業前マガジン
2は、保持台ルaおよび供給爪21aにより保持固定さ
れており、最下段の作業前フレーム5ct一作業ステー
ジ上に供給することが可能である。このため組立作業は
。-1. The worked frame 4aH1 continues to rise while being held in the storage elevator 14, and when it reaches the upper limit of the elevator, a drive source (not shown) moves the frame storage magazine holding stand 22b to the 3
As shown in the figure, the magazine holder 17b is released as it moves below the worked magazine y4a, and the storage elevator 14 begins to descend, so the worked magazine y4B remains on the holding table 22b. Next, the slidable worked magazine discharge rod 19b is moved by the air cylinder 20b to prepare for discharge of the worked magazine 4a. At this time, the supply section elevator 13 is ascending and the storage section elevator 14 is descending, but the magazine 2 before work on the supply section magazine holding table 22a is held and fixed by the holding table rule a and the supply claw 21a. , it is possible to supply the lowermost pre-work frame 5ct onto the work stage. For this reason, the assembly work.
マガジン交換作業のために特に長時間中断することはな
い。There are no particularly long interruptions for magazine replacement work.
フレーム収納部エレベータ14は下降を続け。The frame storage elevator 14 continues to descend.
第4図に示すようにマガジン辷り板26より低い位置ま
で下降すると一時停止する。次に、エアシリンダ25に
よってエアシリンダ24が押きれ、更にマガジン押出し
板23が作動して空のマガジン2bi辷り板26の一端
に押し付は保持固定する。これが空マガジン排出機構及
び空マガジン排出機構である。この時点で作業済フレー
ム5bt−収納することが可能となるので1組立作業後
のフレーム収納は長時間中断することがない。As shown in FIG. 4, when it descends to a position lower than the magazine sliding plate 26, it stops temporarily. Next, the air cylinder 24 is pushed completely by the air cylinder 25, and the magazine pushing plate 23 is further operated to press and hold the empty magazine 2bi at one end of the sliding plate 26. This is an empty magazine ejection mechanism and an empty magazine ejection mechanism. At this point, the completed frame 5b can be stored, so the frame storage after one assembly operation will not be interrupted for a long time.
このあとフレーム供給側エレベータ13が最上限に達す
ると、マガジン押さえ17aが作業前マガジン2t−保
持固定し、→−m←珂供給部マガジン保持台22aが元
の位Itに戻る。また、下降してきたフレーム収納部エ
レベータ145E空−rガジy2bの位@VC達すると
、マガジン押さえ17bが空マガジy2bt−保持固定
する。更に収納部のマガジン排出搏t9bがエアシリン
ダ20bによって動き、マガジン押出爪21bによって
作業済マガジン4t−排出する。これが作業済マガジン
排出機構である。その後収納部マガジン保持台22bが
元の位置に戻る。Thereafter, when the frame supply side elevator 13 reaches its maximum limit, the magazine presser 17a holds and fixes the magazine 2t before operation, and the -m←kine supply section magazine holding stand 22a returns to its original position It. Further, when the lowered frame storage elevator 145E reaches the empty magazine y2b @VC, the magazine presser 17b holds and fixes the empty magazine y2bt. Furthermore, the magazine ejector t9b of the storage section is moved by the air cylinder 20b, and the worked magazine 4t is ejected by the magazine push-out claw 21b. This is the worked magazine ejection mechanism. Thereafter, the storage section magazine holding stand 22b returns to its original position.
以上詳細に説明したように1本発明に工fば、一連の動
作によってフレーム供給部への作業前マガジンの供給と
、フレーム収納部からの作業済マガジンの排出とを自動
的に行うことかで傘る。この間作業者は、マガジン交換
作業に直接関与する必要はなく、装置動作中の任意の時
間に、複数個の作業前マガジン上フレーム供給部上に装
置し、同様に複数個滞留している作業済マガジンをフレ
ーム収納部より取り出すだけでよい。したがって作業効
率は向上し、またマガジン交換が間に合わないために装
置が停止することもなくなるので生産性は大幅に向上す
る。As explained in detail above, one advantage of the present invention is that it is possible to automatically supply unworked magazines to the frame supply section and discharge worked magazines from the frame storage section through a series of operations. take an umbrella During this time, the operator does not need to be directly involved in the magazine replacement work, and at any time during the operation of the machine, the operator can place the machine on the upper frame supply section of the magazine before work, and similarly remove the work that has been done. All you have to do is take out the magazine from the frame storage. Therefore, work efficiency is improved, and since there is no longer a need for the machine to stop because the magazine cannot be replaced in time, productivity is greatly improved.
なお本実施例においては、作業ステージに対してフレー
ム供給部とフレーム収納部と會同じ側に配置したが、第
5図のように作業ステージ金はさんで同列に配置し、フ
レーム供給部よpフレーム収納部に至る空マガジンの搬
送手段を設けた場合もその効果は同様である。In this embodiment, the frame supply section and the frame storage section are placed on the same side of the work stage, but as shown in Fig. 5, they are placed in the same line across the work stage plate, and are separated from the frame supply section. The same effect can be obtained even when a means for transporting an empty magazine to the frame storage section is provided.
第1図は本発明の一実施例におけるフレーム供給部、フ
レーム収納部およびマガジンの位置関係を説明するため
の斜視図、第2図及び#!3図は同じ実施例の側面図、
第4図は同部分側面図、第5図は従来の半導体装置の組
立装置におけるフレーム供給・収納部の原理図、I!6
図は従来のフレーム収納部の一例の側面図である。
1・・・・・・フレーム供給部、2.2a・・・・・・
作業前マガジン、2b・・・・・・空マガジy&3..
..・・フレーム収納部、4.4a・・・・・・作業済
マガジン14b・・・・・・空マガジン% 5a、5c
・・・・・・作業前フレーム% 5b・・・・・・作業
済フレーム、6・・・・・・作業ステージ%7・・・・
・・エレベータ、8・・・・・・ガイドシャフト、9・
・・・・・送りねじ、10・・・・・・モータ、11・
・・・・・歯車、12・・・・・・工1’/I):/1
.13・・・・・・フレーム供給部エレベータ、14・
・・・・・フレーム収納部エレベータ、15a。
15b・・・・・・モータ、16a、16b・・・・・
・送りねじ。
17 a、 17 b−−・−=・マガジン押さえ、
18a、18b・・・・・・エアシリ7ダ、19a−・
・・・・マガジン供給桿。
19b・・・・・・マガジン排出桿% 20a、20′
b・・・・・・エアシリンダ、21a・旧・・マガジン
供給爪、21b・・・・・・マガジン排出爪、22a・
旧・・フレーム供給部マガジン保持台、22b・・・・
・・フレーム収納部マガジン保持台、23・・・・・・
マガジン交換し板、24゜25・・・・・・エアシリン
ダ、26・・・・・・マガジン辷り板。FIG. 1 is a perspective view for explaining the positional relationship between a frame supply section, a frame storage section, and a magazine in an embodiment of the present invention, and FIG. 2 and #! Figure 3 is a side view of the same embodiment;
FIG. 4 is a side view of the same part, and FIG. 5 is a principle diagram of a frame supply/storage section in a conventional semiconductor device assembly apparatus. 6
The figure is a side view of an example of a conventional frame storage section. 1... Frame supply section, 2.2a...
Magazine before work, 2b... Empty magazine y & 3. ..
.. .. ...Frame storage section, 4.4a...Worked magazine 14b...Empty magazine% 5a, 5c
...Frame before work% 5b...Worked frame, 6...Work stage%7...
・・Elevator, 8・・Guide shaft, 9・
...Feed screw, 10...Motor, 11.
...gear, 12...work 1'/I):/1
.. 13... Frame supply section elevator, 14.
...Frame storage elevator, 15a. 15b...Motor, 16a, 16b...
・Feed screw. 17 a, 17 b---・-=・Magazine holder,
18a, 18b...Air cylinder 7, 19a-...
...Magazine supply rod. 19b...Magazine ejection rod% 20a, 20'
b... Air cylinder, 21a... Old magazine supply claw, 21b... Magazine ejection claw, 22a...
Old...Frame supply section magazine holding stand, 22b...
...Frame storage magazine holding stand, 23...
Magazine replacement plate, 24゜25...Air cylinder, 26...Magazine sliding plate.
Claims (1)
業前のリードフレームを供給するリードフレーム供給部
と、所定の組立作業が終了したリードフレームをマガジ
ンケース内に収納するリードフレーム収納部とを有する
半導体装置の組立装置において、前記リードフレーム供
給部にマガジンケースを供給する作業前マガジン供給機
構と、同供給部にてリードフレーム供給が終了した空マ
ガジンを排出する空マガジン排出機構と、前記リードフ
レーム収納部に空マガジンを供給する空マガジン供給機
構と、同収納部にてリードフレーム収納が終了した作業
済マガジンを排出する作業済マガジン排出機構と、さら
に前記空マガジン排出機構と前記空マガジン供給機構と
を連結する空マガジン搬送機構とを有することを特徴と
する半導体装置の組立装置。A semiconductor device having a lead frame supply unit that supplies a lead frame that has been stored in a magazine case before a predetermined assembly operation, and a lead frame storage unit that stores the lead frame that has undergone a predetermined assembly operation in the magazine case. In the assembly apparatus, a pre-operation magazine supply mechanism supplies a magazine case to the lead frame supply section, an empty magazine ejection mechanism that discharges an empty magazine after lead frame supply has been completed in the supply section, and the lead frame storage section. an empty magazine supply mechanism for supplying an empty magazine to a storage section; a worked magazine discharge mechanism for discharging a worked magazine whose lead frame has been stored in the same storage section; and the empty magazine discharge mechanism and the empty magazine supply mechanism. 1. A semiconductor device assembly apparatus comprising an empty magazine transport mechanism connected to the empty magazine transport mechanism.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26674484A JPS61144030A (en) | 1984-12-18 | 1984-12-18 | Semiconductor device assembling machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26674484A JPS61144030A (en) | 1984-12-18 | 1984-12-18 | Semiconductor device assembling machine |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61144030A true JPS61144030A (en) | 1986-07-01 |
JPH0421340B2 JPH0421340B2 (en) | 1992-04-09 |
Family
ID=17435100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26674484A Granted JPS61144030A (en) | 1984-12-18 | 1984-12-18 | Semiconductor device assembling machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61144030A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6457723A (en) * | 1987-08-28 | 1989-03-06 | Sony Corp | Conveyor for lead frame |
JPH01140731A (en) * | 1987-11-27 | 1989-06-01 | Toshiba Seiki Kk | Magazine exchange apparatus |
JPH07179224A (en) * | 1994-11-28 | 1995-07-18 | Toshiba Seiki Kk | Magazine transferring method |
CN102070020A (en) * | 2010-11-01 | 2011-05-25 | 沙洲职业工学院 | Automatic feeding device in solar battery slice detector |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5352066A (en) * | 1976-10-22 | 1978-05-12 | Hitachi Ltd | Bonding unit |
-
1984
- 1984-12-18 JP JP26674484A patent/JPS61144030A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5352066A (en) * | 1976-10-22 | 1978-05-12 | Hitachi Ltd | Bonding unit |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6457723A (en) * | 1987-08-28 | 1989-03-06 | Sony Corp | Conveyor for lead frame |
JPH01140731A (en) * | 1987-11-27 | 1989-06-01 | Toshiba Seiki Kk | Magazine exchange apparatus |
JPH07179224A (en) * | 1994-11-28 | 1995-07-18 | Toshiba Seiki Kk | Magazine transferring method |
CN102070020A (en) * | 2010-11-01 | 2011-05-25 | 沙洲职业工学院 | Automatic feeding device in solar battery slice detector |
Also Published As
Publication number | Publication date |
---|---|
JPH0421340B2 (en) | 1992-04-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |