JPS6114356B2 - - Google Patents

Info

Publication number
JPS6114356B2
JPS6114356B2 JP52118357A JP11835777A JPS6114356B2 JP S6114356 B2 JPS6114356 B2 JP S6114356B2 JP 52118357 A JP52118357 A JP 52118357A JP 11835777 A JP11835777 A JP 11835777A JP S6114356 B2 JPS6114356 B2 JP S6114356B2
Authority
JP
Japan
Prior art keywords
pressure
chamber
room
air
control valves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52118357A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5452313A (en
Inventor
Fumitaka Ishizuka
Saburo Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP11835777A priority Critical patent/JPS5452313A/ja
Publication of JPS5452313A publication Critical patent/JPS5452313A/ja
Publication of JPS6114356B2 publication Critical patent/JPS6114356B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
JP11835777A 1977-09-30 1977-09-30 Room pressure control system Granted JPS5452313A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11835777A JPS5452313A (en) 1977-09-30 1977-09-30 Room pressure control system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11835777A JPS5452313A (en) 1977-09-30 1977-09-30 Room pressure control system

Publications (2)

Publication Number Publication Date
JPS5452313A JPS5452313A (en) 1979-04-24
JPS6114356B2 true JPS6114356B2 (US06633600-20031014-M00021.png) 1986-04-18

Family

ID=14734694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11835777A Granted JPS5452313A (en) 1977-09-30 1977-09-30 Room pressure control system

Country Status (1)

Country Link
JP (1) JPS5452313A (US06633600-20031014-M00021.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63168538A (ja) * 1986-12-29 1988-07-12 Ryohei Ishida 分析試料用霧発生装置
JPH02128563U (US06633600-20031014-M00021.png) * 1989-03-28 1990-10-23

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113079A (ja) * 1983-11-24 1985-06-19 Hitachi Plant Eng & Constr Co Ltd 陰圧室制御装置
CN101309719B (zh) 2005-12-02 2013-03-06 C.R.巴德有限公司 压力启动的近端阀

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63168538A (ja) * 1986-12-29 1988-07-12 Ryohei Ishida 分析試料用霧発生装置
JPH02128563U (US06633600-20031014-M00021.png) * 1989-03-28 1990-10-23

Also Published As

Publication number Publication date
JPS5452313A (en) 1979-04-24

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