JPS61142863U - - Google Patents
Info
- Publication number
- JPS61142863U JPS61142863U JP2641885U JP2641885U JPS61142863U JP S61142863 U JPS61142863 U JP S61142863U JP 2641885 U JP2641885 U JP 2641885U JP 2641885 U JP2641885 U JP 2641885U JP S61142863 U JPS61142863 U JP S61142863U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- rotating
- vacuum container
- substrate holders
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000000498 cooling water Substances 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例の縦断面図、第２図
は本考案の平面図である。 １……真空容器、２……基板ホルダ、３……取
付台、８，９……冷却用水路。
は本考案の平面図である。 １……真空容器、２……基板ホルダ、３……取
付台、８，９……冷却用水路。
Claims (1)
- 【実用新案登録請求の範囲】 真空容器と、その真空容器内に被加工物を載置
する複数個の基板ホルダと、この基板ホルダを支
持する取付台と、前記基板ホルダを自公転させる
歯車及び回転軸からなる薄膜形成装置において、 前記基板ホルダまで冷却用水路を設け自公転す
る前記基板ホルダを直接冷却することを特徴とす
る基板ホルダの冷却装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2641885U JPS61142863U (ja) | 1985-02-27 | 1985-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2641885U JPS61142863U (ja) | 1985-02-27 | 1985-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61142863U true JPS61142863U (ja) | 1986-09-03 |
Family
ID=30522410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2641885U Pending JPS61142863U (ja) | 1985-02-27 | 1985-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61142863U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0367062U (ja) * | 1989-10-31 | 1991-06-28 |
-
1985
- 1985-02-27 JP JP2641885U patent/JPS61142863U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0367062U (ja) * | 1989-10-31 | 1991-06-28 |