JPS61142861U - - Google Patents

Info

Publication number
JPS61142861U
JPS61142861U JP2820185U JP2820185U JPS61142861U JP S61142861 U JPS61142861 U JP S61142861U JP 2820185 U JP2820185 U JP 2820185U JP 2820185 U JP2820185 U JP 2820185U JP S61142861 U JPS61142861 U JP S61142861U
Authority
JP
Japan
Prior art keywords
vapor deposition
deposition apparatus
crucible
shielding means
discharge hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2820185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2820185U priority Critical patent/JPS61142861U/ja
Publication of JPS61142861U publication Critical patent/JPS61142861U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2820185U 1985-02-26 1985-02-26 Pending JPS61142861U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2820185U JPS61142861U (enrdf_load_html_response) 1985-02-26 1985-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2820185U JPS61142861U (enrdf_load_html_response) 1985-02-26 1985-02-26

Publications (1)

Publication Number Publication Date
JPS61142861U true JPS61142861U (enrdf_load_html_response) 1986-09-03

Family

ID=30525867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2820185U Pending JPS61142861U (enrdf_load_html_response) 1985-02-26 1985-02-26

Country Status (1)

Country Link
JP (1) JPS61142861U (enrdf_load_html_response)

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