JPS61142442U - - Google Patents

Info

Publication number
JPS61142442U
JPS61142442U JP17040284U JP17040284U JPS61142442U JP S61142442 U JPS61142442 U JP S61142442U JP 17040284 U JP17040284 U JP 17040284U JP 17040284 U JP17040284 U JP 17040284U JP S61142442 U JPS61142442 U JP S61142442U
Authority
JP
Japan
Prior art keywords
substrate
processing apparatus
rotary chuck
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17040284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17040284U priority Critical patent/JPS61142442U/ja
Publication of JPS61142442U publication Critical patent/JPS61142442U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Weting (AREA)
JP17040284U 1984-11-12 1984-11-12 Pending JPS61142442U (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17040284U JPS61142442U (US07943777-20110517-C00090.png) 1984-11-12 1984-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17040284U JPS61142442U (US07943777-20110517-C00090.png) 1984-11-12 1984-11-12

Publications (1)

Publication Number Publication Date
JPS61142442U true JPS61142442U (US07943777-20110517-C00090.png) 1986-09-03

Family

ID=30728110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17040284U Pending JPS61142442U (US07943777-20110517-C00090.png) 1984-11-12 1984-11-12

Country Status (1)

Country Link
JP (1) JPS61142442U (US07943777-20110517-C00090.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142817A (ja) * 1986-12-05 1988-06-15 Tokyo Electron Ltd 基板の処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS626691U (US07943777-20110517-C00090.png) * 1985-06-26 1987-01-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS626691U (US07943777-20110517-C00090.png) * 1985-06-26 1987-01-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142817A (ja) * 1986-12-05 1988-06-15 Tokyo Electron Ltd 基板の処理装置

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