JPS61142405A - 光学式変位測定装置 - Google Patents

光学式変位測定装置

Info

Publication number
JPS61142405A
JPS61142405A JP26583084A JP26583084A JPS61142405A JP S61142405 A JPS61142405 A JP S61142405A JP 26583084 A JP26583084 A JP 26583084A JP 26583084 A JP26583084 A JP 26583084A JP S61142405 A JPS61142405 A JP S61142405A
Authority
JP
Japan
Prior art keywords
optical
unit
optical system
measuring device
units
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26583084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0315126B2 (enExample
Inventor
Osamu Koizumi
小泉　統
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP26583084A priority Critical patent/JPS61142405A/ja
Publication of JPS61142405A publication Critical patent/JPS61142405A/ja
Publication of JPH0315126B2 publication Critical patent/JPH0315126B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP26583084A 1984-12-17 1984-12-17 光学式変位測定装置 Granted JPS61142405A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26583084A JPS61142405A (ja) 1984-12-17 1984-12-17 光学式変位測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26583084A JPS61142405A (ja) 1984-12-17 1984-12-17 光学式変位測定装置

Publications (2)

Publication Number Publication Date
JPS61142405A true JPS61142405A (ja) 1986-06-30
JPH0315126B2 JPH0315126B2 (enExample) 1991-02-28

Family

ID=17422644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26583084A Granted JPS61142405A (ja) 1984-12-17 1984-12-17 光学式変位測定装置

Country Status (1)

Country Link
JP (1) JPS61142405A (enExample)

Also Published As

Publication number Publication date
JPH0315126B2 (enExample) 1991-02-28

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