JPS61141927U - - Google Patents

Info

Publication number

JPS61141927U

JPS61141927U JP2134885U JP2134885U JPS61141927U JP S61141927 U JPS61141927 U JP S61141927U JP 2134885 U JP2134885 U JP 2134885U JP 2134885 U JP2134885 U JP 2134885U JP S61141927 U JPS61141927 U JP S61141927U

Authority

JP

Japan

Prior art keywords

insulating spacer

metal

solid insulator

oxide film

copper

Prior art date

1985-02-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229910052751 metal Inorganic materials 0.000 claims description 7
• 239000002184 metal Substances 0.000 claims description 7
• 125000006850 spacer group Chemical group 0.000 claims description 7
• 239000012212 insulator Substances 0.000 claims description 5
• 239000007787 solid Substances 0.000 claims description 5
• 239000004020 conductor Substances 0.000 claims description 2
• 229910000838 Al alloy Inorganic materials 0.000 claims 1
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
• QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical group [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims 1
• 239000005751 Copper oxide Substances 0.000 claims 1
• 229910000881 Cu alloy Inorganic materials 0.000 claims 1
• 229910052782 aluminium Inorganic materials 0.000 claims 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
• 229910052802 copper Inorganic materials 0.000 claims 1
• 239000010949 copper Substances 0.000 claims 1
• 229910000431 copper oxide Inorganic materials 0.000 claims 1
• 229910044991 metal oxide Inorganic materials 0.000 claims 1
• 150000004706 metal oxides Chemical class 0.000 claims 1