JPS61140537U - - Google Patents
Info
- Publication number
- JPS61140537U JPS61140537U JP2399885U JP2399885U JPS61140537U JP S61140537 U JPS61140537 U JP S61140537U JP 2399885 U JP2399885 U JP 2399885U JP 2399885 U JP2399885 U JP 2399885U JP S61140537 U JPS61140537 U JP S61140537U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer storage
- storage jig
- side wall
- fluorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 2
- 229910052731 fluorine Inorganic materials 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2399885U JPS61140537U (pl) | 1985-02-21 | 1985-02-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2399885U JPS61140537U (pl) | 1985-02-21 | 1985-02-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61140537U true JPS61140537U (pl) | 1986-08-30 |
Family
ID=30517744
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2399885U Pending JPS61140537U (pl) | 1985-02-21 | 1985-02-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61140537U (pl) |
-
1985
- 1985-02-21 JP JP2399885U patent/JPS61140537U/ja active Pending
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