JPS61140537U - - Google Patents

Info

Publication number

JPS61140537U

JPS61140537U JP2399885U JP2399885U JPS61140537U JP S61140537 U JPS61140537 U JP S61140537U JP 2399885 U JP2399885 U JP 2399885U JP 2399885 U JP2399885 U JP 2399885U JP S61140537 U JPS61140537 U JP S61140537U

Authority

JP

Japan

Prior art keywords

semiconductor wafer

wafer storage

storage jig

side wall

fluorine

Prior art date

1985-02-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 3
• YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 2
• 229910052731 fluorine Inorganic materials 0.000 claims description 2
• 239000011737 fluorine Substances 0.000 claims description 2
• 239000011347 resin Substances 0.000 claims description 2
• 229920005989 resin Polymers 0.000 claims description 2
• 239000002184 metal Substances 0.000 claims 1
• NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1