JPS61140537U - - Google Patents
Info
- Publication number
- JPS61140537U JPS61140537U JP1985023998U JP2399885U JPS61140537U JP S61140537 U JPS61140537 U JP S61140537U JP 1985023998 U JP1985023998 U JP 1985023998U JP 2399885 U JP2399885 U JP 2399885U JP S61140537 U JPS61140537 U JP S61140537U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer storage
- storage jig
- side wall
- fluorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985023998U JPS61140537U (enExample) | 1985-02-21 | 1985-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985023998U JPS61140537U (enExample) | 1985-02-21 | 1985-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61140537U true JPS61140537U (enExample) | 1986-08-30 |
Family
ID=30517744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985023998U Pending JPS61140537U (enExample) | 1985-02-21 | 1985-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61140537U (enExample) |
-
1985
- 1985-02-21 JP JP1985023998U patent/JPS61140537U/ja active Pending