JPS61140531U - - Google Patents
Info
- Publication number
- JPS61140531U JPS61140531U JP2318185U JP2318185U JPS61140531U JP S61140531 U JPS61140531 U JP S61140531U JP 2318185 U JP2318185 U JP 2318185U JP 2318185 U JP2318185 U JP 2318185U JP S61140531 U JPS61140531 U JP S61140531U
- Authority
- JP
- Japan
- Prior art keywords
- reduced pressure
- pressure container
- cathode
- etching apparatus
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2318185U JPS61140531U (enExample) | 1985-02-20 | 1985-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2318185U JPS61140531U (enExample) | 1985-02-20 | 1985-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61140531U true JPS61140531U (enExample) | 1986-08-30 |
Family
ID=30516184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2318185U Pending JPS61140531U (enExample) | 1985-02-20 | 1985-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61140531U (enExample) |
-
1985
- 1985-02-20 JP JP2318185U patent/JPS61140531U/ja active Pending