JPS61120434U - - Google Patents
Info
- Publication number
- JPS61120434U JPS61120434U JP466885U JP466885U JPS61120434U JP S61120434 U JPS61120434 U JP S61120434U JP 466885 U JP466885 U JP 466885U JP 466885 U JP466885 U JP 466885U JP S61120434 U JPS61120434 U JP S61120434U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- electrostatic chuck
- opens
- electrostatic
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003989 dielectric material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP466885U JPS61120434U (enExample) | 1985-01-17 | 1985-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP466885U JPS61120434U (enExample) | 1985-01-17 | 1985-01-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61120434U true JPS61120434U (enExample) | 1986-07-29 |
Family
ID=30480460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP466885U Pending JPS61120434U (enExample) | 1985-01-17 | 1985-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61120434U (enExample) |
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1985
- 1985-01-17 JP JP466885U patent/JPS61120434U/ja active Pending