JPS61139706A - 自動表面粗さ測定装置 - Google Patents

自動表面粗さ測定装置

Info

Publication number
JPS61139706A
JPS61139706A JP26084684A JP26084684A JPS61139706A JP S61139706 A JPS61139706 A JP S61139706A JP 26084684 A JP26084684 A JP 26084684A JP 26084684 A JP26084684 A JP 26084684A JP S61139706 A JPS61139706 A JP S61139706A
Authority
JP
Japan
Prior art keywords
image signal
digital image
texture
roughness
surface roughness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26084684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0511563B2 (enrdf_load_stackoverflow
Inventor
Osamu Furukimi
修 古君
Yoshifumi Nakano
中野　善文
Makoto Imanaka
誠 今中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP26084684A priority Critical patent/JPS61139706A/ja
Publication of JPS61139706A publication Critical patent/JPS61139706A/ja
Publication of JPH0511563B2 publication Critical patent/JPH0511563B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Processing Or Creating Images (AREA)
JP26084684A 1984-12-12 1984-12-12 自動表面粗さ測定装置 Granted JPS61139706A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26084684A JPS61139706A (ja) 1984-12-12 1984-12-12 自動表面粗さ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26084684A JPS61139706A (ja) 1984-12-12 1984-12-12 自動表面粗さ測定装置

Publications (2)

Publication Number Publication Date
JPS61139706A true JPS61139706A (ja) 1986-06-27
JPH0511563B2 JPH0511563B2 (enrdf_load_stackoverflow) 1993-02-15

Family

ID=17353567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26084684A Granted JPS61139706A (ja) 1984-12-12 1984-12-12 自動表面粗さ測定装置

Country Status (1)

Country Link
JP (1) JPS61139706A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06249633A (ja) * 1991-05-28 1994-09-09 American Teleph & Telegr Co <Att> 反射性のパタンの特質を監視するための検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06249633A (ja) * 1991-05-28 1994-09-09 American Teleph & Telegr Co <Att> 反射性のパタンの特質を監視するための検査方法

Also Published As

Publication number Publication date
JPH0511563B2 (enrdf_load_stackoverflow) 1993-02-15

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