JPS61139403U - - Google Patents
Info
- Publication number
- JPS61139403U JPS61139403U JP2187285U JP2187285U JPS61139403U JP S61139403 U JPS61139403 U JP S61139403U JP 2187285 U JP2187285 U JP 2187285U JP 2187285 U JP2187285 U JP 2187285U JP S61139403 U JPS61139403 U JP S61139403U
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- tip
- diamond chip
- recess
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910003460 diamond Inorganic materials 0.000 claims description 9
- 239000010432 diamond Substances 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 1
- 239000000523 sample Substances 0.000 claims 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
第１図は本考案の第１実施例のダイヤモンドチ
ツプの斜視図、第２図、第３図は本考案の他の実
施例のダイヤモンドチツプの斜視図、第４図は公
知のダイヤモンドチツプ及び本考案のダイヤモン
ドチツプをシリコンウエハーの凹部に挿入した状
態の断面図、第５図は公知のダイヤモンドチツプ
の正面図である。
８……凹部、８′……凹部の底部、９……シリ
コンウエハー、１１……ダイヤモンドチツプ、１
２……角錐面、１３……球面。
FIG. 1 is a perspective view of a diamond chip according to a first embodiment of the present invention, FIGS. 2 and 3 are perspective views of diamond chips according to other embodiments of the present invention, and FIG. 4 is a perspective view of a diamond chip according to a first embodiment of the present invention. A sectional view of the invented diamond chip inserted into a recess of a silicon wafer, and FIG. 5 is a front view of a known diamond chip. 8...Recess, 8'...Bottom of the recess, 9...Silicon wafer, 11...Diamond chip, 1
2...Pyramidal surface, 13...Spherical surface.
Claims (1)
エハーの凹部内に挿入可能な内包角を有する角錐
面を形成することにより、ダイヤモンドチツプの
最先端に半径１ミクロン未満の球面を形成したこ
とを特徴とする検査、測定用の測定子、マーキン
グ用具等に取付けるダイヤモンドチツプ。 An inspection characterized in that a spherical surface with a radius of less than 1 micron is formed at the leading edge of the diamond chip by forming a pyramidal surface with an included angle that can be inserted into the recess of the silicon wafer near the tip of the diamond chip, A diamond tip that can be attached to measuring probes, marking tools, etc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2187285U JPS61139403U (en) | 1985-02-20 | 1985-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2187285U JPS61139403U (en) | 1985-02-20 | 1985-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61139403U true JPS61139403U (en) | 1986-08-29 |
Family
ID=30513652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2187285U Pending JPS61139403U (en) | 1985-02-20 | 1985-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61139403U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013200211A (en) * | 2012-03-26 | 2013-10-03 | Ogura Jewel Ind Co Ltd | Stylus |
-
1985
- 1985-02-20 JP JP2187285U patent/JPS61139403U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013200211A (en) * | 2012-03-26 | 2013-10-03 | Ogura Jewel Ind Co Ltd | Stylus |
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