JPS61138488U - - Google Patents

Info

Publication number
JPS61138488U
JPS61138488U JP1985019437U JP1943785U JPS61138488U JP S61138488 U JPS61138488 U JP S61138488U JP 1985019437 U JP1985019437 U JP 1985019437U JP 1943785 U JP1943785 U JP 1943785U JP S61138488 U JPS61138488 U JP S61138488U
Authority
JP
Japan
Prior art keywords
mask pattern
pattern plates
same plane
plates
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985019437U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0320057Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985019437U priority Critical patent/JPH0320057Y2/ja
Publication of JPS61138488U publication Critical patent/JPS61138488U/ja
Application granted granted Critical
Publication of JPH0320057Y2 publication Critical patent/JPH0320057Y2/ja
Expired legal-status Critical Current

Links

JP1985019437U 1985-02-13 1985-02-13 Expired JPH0320057Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985019437U JPH0320057Y2 (enExample) 1985-02-13 1985-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985019437U JPH0320057Y2 (enExample) 1985-02-13 1985-02-13

Publications (2)

Publication Number Publication Date
JPS61138488U true JPS61138488U (enExample) 1986-08-28
JPH0320057Y2 JPH0320057Y2 (enExample) 1991-04-30

Family

ID=30509021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985019437U Expired JPH0320057Y2 (enExample) 1985-02-13 1985-02-13

Country Status (1)

Country Link
JP (1) JPH0320057Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57206591A (en) * 1981-05-13 1982-12-17 Datogurafu Peteirigangusu Gmbh Device for forming mark onto surface of body by laser beam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57206591A (en) * 1981-05-13 1982-12-17 Datogurafu Peteirigangusu Gmbh Device for forming mark onto surface of body by laser beam

Also Published As

Publication number Publication date
JPH0320057Y2 (enExample) 1991-04-30

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