JPS61138157U - - Google Patents

Info

Publication number
JPS61138157U
JPS61138157U JP2145785U JP2145785U JPS61138157U JP S61138157 U JPS61138157 U JP S61138157U JP 2145785 U JP2145785 U JP 2145785U JP 2145785 U JP2145785 U JP 2145785U JP S61138157 U JPS61138157 U JP S61138157U
Authority
JP
Japan
Prior art keywords
change
amount
control system
detection means
discharge detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2145785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2145785U priority Critical patent/JPS61138157U/ja
Publication of JPS61138157U publication Critical patent/JPS61138157U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Safety Devices In Control Systems (AREA)
JP2145785U 1985-02-18 1985-02-18 Pending JPS61138157U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2145785U JPS61138157U (enrdf_load_stackoverflow) 1985-02-18 1985-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2145785U JPS61138157U (enrdf_load_stackoverflow) 1985-02-18 1985-02-18

Publications (1)

Publication Number Publication Date
JPS61138157U true JPS61138157U (enrdf_load_stackoverflow) 1986-08-27

Family

ID=30512870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2145785U Pending JPS61138157U (enrdf_load_stackoverflow) 1985-02-18 1985-02-18

Country Status (1)

Country Link
JP (1) JPS61138157U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152457A (en) * 1978-05-22 1979-11-30 Jeol Ltd High-tension power supply of electron microscope or the like

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152457A (en) * 1978-05-22 1979-11-30 Jeol Ltd High-tension power supply of electron microscope or the like

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