JPS54152457A - High-tension power supply of electron microscope or the like - Google Patents

High-tension power supply of electron microscope or the like

Info

Publication number
JPS54152457A
JPS54152457A JP6080478A JP6080478A JPS54152457A JP S54152457 A JPS54152457 A JP S54152457A JP 6080478 A JP6080478 A JP 6080478A JP 6080478 A JP6080478 A JP 6080478A JP S54152457 A JPS54152457 A JP S54152457A
Authority
JP
Japan
Prior art keywords
voltage
pulse
time
counter
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6080478A
Other languages
Japanese (ja)
Other versions
JPS6145348B2 (en
Inventor
Sakuyoshi Moriguchi
Yoshiyasu Harada
Yoichi Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP6080478A priority Critical patent/JPS54152457A/en
Publication of JPS54152457A publication Critical patent/JPS54152457A/en
Publication of JPS6145348B2 publication Critical patent/JPS6145348B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Direct Current Feeding And Distribution (AREA)

Abstract

PURPOSE: To prevent a boosting circuit from breaking down when applying an acceleration voltage by increasing gradually the voltage as the time elapses and by resetting the voltage on detecting discharge.
CONSTITUTION: Pulse generator 1 generates one clock pulse at every constant interval of time. At every time when this clock pulse is generated, counter 2 counts up and according to it, H.V. developed by high-tension generating circuit 4 rises by stages of 10KV, 20KV and 30KV. A sudden increase may cause the boosting circuit to break down. Even increasing the voltage by stage may cause overdischarge. Once the overdischarge occurs, detection circuit 7 outputs a reset pulse to counter 2. As a result, H.V. becomes zero and then rises again. When H.V. reaches a set voltage, the generation of the pulse ends and the final acceleration voltage is impressed.
COPYRIGHT: (C)1979,JPO&Japio
JP6080478A 1978-05-22 1978-05-22 High-tension power supply of electron microscope or the like Granted JPS54152457A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6080478A JPS54152457A (en) 1978-05-22 1978-05-22 High-tension power supply of electron microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6080478A JPS54152457A (en) 1978-05-22 1978-05-22 High-tension power supply of electron microscope or the like

Publications (2)

Publication Number Publication Date
JPS54152457A true JPS54152457A (en) 1979-11-30
JPS6145348B2 JPS6145348B2 (en) 1986-10-07

Family

ID=13152877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6080478A Granted JPS54152457A (en) 1978-05-22 1978-05-22 High-tension power supply of electron microscope or the like

Country Status (1)

Country Link
JP (1) JPS54152457A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61138157U (en) * 1985-02-18 1986-08-27

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5112800A (en) * 1974-07-22 1976-01-31 Atsushi Funeno KEIONKITSUKIANZENHYOJITO
JPS523379A (en) * 1975-06-24 1977-01-11 Jeol Ltd Electronic lens controller for electronic microscope or the like

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5112800A (en) * 1974-07-22 1976-01-31 Atsushi Funeno KEIONKITSUKIANZENHYOJITO
JPS523379A (en) * 1975-06-24 1977-01-11 Jeol Ltd Electronic lens controller for electronic microscope or the like

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61138157U (en) * 1985-02-18 1986-08-27

Also Published As

Publication number Publication date
JPS6145348B2 (en) 1986-10-07

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