JPS61138149A - 透過電子線エネルギ−スペクトルの測定方法 - Google Patents

透過電子線エネルギ−スペクトルの測定方法

Info

Publication number
JPS61138149A
JPS61138149A JP59261185A JP26118584A JPS61138149A JP S61138149 A JPS61138149 A JP S61138149A JP 59261185 A JP59261185 A JP 59261185A JP 26118584 A JP26118584 A JP 26118584A JP S61138149 A JPS61138149 A JP S61138149A
Authority
JP
Japan
Prior art keywords
electron beam
function
data
intensity
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59261185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH053915B2 (cg-RX-API-DMAC7.html
Inventor
Shotaro Izumi
昭太郎 泉
Kenichi Ohori
謙一 大堀
Yoshiharu Sasaki
佐々木 義治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP59261185A priority Critical patent/JPS61138149A/ja
Publication of JPS61138149A publication Critical patent/JPS61138149A/ja
Publication of JPH053915B2 publication Critical patent/JPH053915B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
JP59261185A 1984-12-11 1984-12-11 透過電子線エネルギ−スペクトルの測定方法 Granted JPS61138149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59261185A JPS61138149A (ja) 1984-12-11 1984-12-11 透過電子線エネルギ−スペクトルの測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59261185A JPS61138149A (ja) 1984-12-11 1984-12-11 透過電子線エネルギ−スペクトルの測定方法

Publications (2)

Publication Number Publication Date
JPS61138149A true JPS61138149A (ja) 1986-06-25
JPH053915B2 JPH053915B2 (cg-RX-API-DMAC7.html) 1993-01-18

Family

ID=17358311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59261185A Granted JPS61138149A (ja) 1984-12-11 1984-12-11 透過電子線エネルギ−スペクトルの測定方法

Country Status (1)

Country Link
JP (1) JPS61138149A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH053915B2 (cg-RX-API-DMAC7.html) 1993-01-18

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