JPS6113794Y2 - - Google Patents
Info
- Publication number
- JPS6113794Y2 JPS6113794Y2 JP471481U JP471481U JPS6113794Y2 JP S6113794 Y2 JPS6113794 Y2 JP S6113794Y2 JP 471481 U JP471481 U JP 471481U JP 471481 U JP471481 U JP 471481U JP S6113794 Y2 JPS6113794 Y2 JP S6113794Y2
- Authority
- JP
- Japan
- Prior art keywords
- belt
- lever
- load
- shaft
- side wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004804 winding Methods 0.000 claims description 8
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 claims 1
- 239000002184 metal Substances 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP471481U JPS6113794Y2 (de) | 1981-01-16 | 1981-01-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP471481U JPS6113794Y2 (de) | 1981-01-16 | 1981-01-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57117238U JPS57117238U (de) | 1982-07-20 |
JPS6113794Y2 true JPS6113794Y2 (de) | 1986-04-28 |
Family
ID=29803119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP471481U Expired JPS6113794Y2 (de) | 1981-01-16 | 1981-01-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6113794Y2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10261775A1 (de) | 2002-12-20 | 2004-07-01 | Carl Zeiss Smt Ag | Vorrichtung zur optischen Vermessung eines Abbildungssystems |
WO2005071491A2 (en) | 2004-01-20 | 2005-08-04 | Carl Zeiss Smt Ag | Exposure apparatus and measuring device for a projection lens |
KR101257960B1 (ko) | 2004-06-04 | 2013-04-24 | 칼 짜이스 에스엠테 게엠베하 | 광학적 결상 시스템의 결상 품질을 측정하기 위한 시스템 |
US7463330B2 (en) | 2004-07-07 | 2008-12-09 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
DE102006021797A1 (de) | 2006-05-09 | 2007-11-15 | Carl Zeiss Smt Ag | Optische Abbildungseinrichtung mit thermischer Dämpfung |
-
1981
- 1981-01-16 JP JP471481U patent/JPS6113794Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS57117238U (de) | 1982-07-20 |
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