JPS6113794Y2 - - Google Patents

Info

Publication number
JPS6113794Y2
JPS6113794Y2 JP471481U JP471481U JPS6113794Y2 JP S6113794 Y2 JPS6113794 Y2 JP S6113794Y2 JP 471481 U JP471481 U JP 471481U JP 471481 U JP471481 U JP 471481U JP S6113794 Y2 JPS6113794 Y2 JP S6113794Y2
Authority
JP
Japan
Prior art keywords
belt
lever
load
shaft
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP471481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57117238U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP471481U priority Critical patent/JPS6113794Y2/ja
Publication of JPS57117238U publication Critical patent/JPS57117238U/ja
Application granted granted Critical
Publication of JPS6113794Y2 publication Critical patent/JPS6113794Y2/ja
Expired legal-status Critical Current

Links

JP471481U 1981-01-16 1981-01-16 Expired JPS6113794Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP471481U JPS6113794Y2 (de) 1981-01-16 1981-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP471481U JPS6113794Y2 (de) 1981-01-16 1981-01-16

Publications (2)

Publication Number Publication Date
JPS57117238U JPS57117238U (de) 1982-07-20
JPS6113794Y2 true JPS6113794Y2 (de) 1986-04-28

Family

ID=29803119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP471481U Expired JPS6113794Y2 (de) 1981-01-16 1981-01-16

Country Status (1)

Country Link
JP (1) JPS6113794Y2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10261775A1 (de) 2002-12-20 2004-07-01 Carl Zeiss Smt Ag Vorrichtung zur optischen Vermessung eines Abbildungssystems
WO2005071491A2 (en) 2004-01-20 2005-08-04 Carl Zeiss Smt Ag Exposure apparatus and measuring device for a projection lens
KR101257960B1 (ko) 2004-06-04 2013-04-24 칼 짜이스 에스엠테 게엠베하 광학적 결상 시스템의 결상 품질을 측정하기 위한 시스템
US7463330B2 (en) 2004-07-07 2008-12-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
DE102006021797A1 (de) 2006-05-09 2007-11-15 Carl Zeiss Smt Ag Optische Abbildungseinrichtung mit thermischer Dämpfung

Also Published As

Publication number Publication date
JPS57117238U (de) 1982-07-20

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