JPS61137948U - - Google Patents

Info

Publication number

JPS61137948U

JPS61137948U JP1985022101U JP2210185U JPS61137948U JP S61137948 U JPS61137948 U JP S61137948U JP 1985022101 U JP1985022101 U JP 1985022101U JP 2210185 U JP2210185 U JP 2210185U JP S61137948 U JPS61137948 U JP S61137948U

Authority

JP

Japan

Prior art keywords

frame

substrate surface

protective film

pellicle protective

reticles

Prior art date

1985-02-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000001681 protective effect Effects 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 239000002313 adhesive film Substances 0.000 claims description 2
• 238000004519 manufacturing process Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 239000000020 Nitrocellulose Substances 0.000 description 1
• 239000010408 film Substances 0.000 description 1
• 229920001220 nitrocellulos Polymers 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1

Cited By (1)