JPS61136534U - - Google Patents
Info
- Publication number
- JPS61136534U JPS61136534U JP1892085U JP1892085U JPS61136534U JP S61136534 U JPS61136534 U JP S61136534U JP 1892085 U JP1892085 U JP 1892085U JP 1892085 U JP1892085 U JP 1892085U JP S61136534 U JPS61136534 U JP S61136534U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- substrate
- treatment furnace
- processed
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1892085U JPS61136534U (zh) | 1985-02-12 | 1985-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1892085U JPS61136534U (zh) | 1985-02-12 | 1985-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61136534U true JPS61136534U (zh) | 1986-08-25 |
Family
ID=30508010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1892085U Pending JPS61136534U (zh) | 1985-02-12 | 1985-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61136534U (zh) |
-
1985
- 1985-02-12 JP JP1892085U patent/JPS61136534U/ja active Pending