JPS61135500U - - Google Patents
Info
- Publication number
- JPS61135500U JPS61135500U JP1783085U JP1783085U JPS61135500U JP S61135500 U JPS61135500 U JP S61135500U JP 1783085 U JP1783085 U JP 1783085U JP 1783085 U JP1783085 U JP 1783085U JP S61135500 U JPS61135500 U JP S61135500U
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- plasma discharge
- microwave plasma
- discharge device
- radio wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002265 prevention Effects 0.000 claims description 4
- 230000006750 UV protection Effects 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 239000000112 cooling gas Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1783085U JPS61135500U (enExample) | 1985-02-13 | 1985-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1783085U JPS61135500U (enExample) | 1985-02-13 | 1985-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61135500U true JPS61135500U (enExample) | 1986-08-23 |
Family
ID=30505902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1783085U Pending JPS61135500U (enExample) | 1985-02-13 | 1985-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61135500U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007326063A (ja) * | 2006-06-09 | 2007-12-20 | Hitachi Plant Technologies Ltd | マイクロ化学反応装置 |
-
1985
- 1985-02-13 JP JP1783085U patent/JPS61135500U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007326063A (ja) * | 2006-06-09 | 2007-12-20 | Hitachi Plant Technologies Ltd | マイクロ化学反応装置 |
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