JPS61193455U - - Google Patents
Info
- Publication number
- JPS61193455U JPS61193455U JP1985077843U JP7784385U JPS61193455U JP S61193455 U JPS61193455 U JP S61193455U JP 1985077843 U JP1985077843 U JP 1985077843U JP 7784385 U JP7784385 U JP 7784385U JP S61193455 U JPS61193455 U JP S61193455U
- Authority
- JP
- Japan
- Prior art keywords
- glass mask
- cleaning
- cleaning water
- water nozzle
- exhaust box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985077843U JPS61193455U (enExample) | 1985-05-25 | 1985-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985077843U JPS61193455U (enExample) | 1985-05-25 | 1985-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61193455U true JPS61193455U (enExample) | 1986-12-02 |
Family
ID=30621278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985077843U Pending JPS61193455U (enExample) | 1985-05-25 | 1985-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61193455U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005317922A (ja) * | 2004-03-29 | 2005-11-10 | Shibaura Mechatronics Corp | 基板の処理装置及び処理方法 |
-
1985
- 1985-05-25 JP JP1985077843U patent/JPS61193455U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005317922A (ja) * | 2004-03-29 | 2005-11-10 | Shibaura Mechatronics Corp | 基板の処理装置及び処理方法 |