JPS61134882U - - Google Patents

Info

Publication number
JPS61134882U
JPS61134882U JP1827085U JP1827085U JPS61134882U JP S61134882 U JPS61134882 U JP S61134882U JP 1827085 U JP1827085 U JP 1827085U JP 1827085 U JP1827085 U JP 1827085U JP S61134882 U JPS61134882 U JP S61134882U
Authority
JP
Japan
Prior art keywords
pad
conduit
vacuum chuck
pin
negative pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1827085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1827085U priority Critical patent/JPS61134882U/ja
Publication of JPS61134882U publication Critical patent/JPS61134882U/ja
Pending legal-status Critical Current

Links

JP1827085U 1985-02-12 1985-02-12 Pending JPS61134882U (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1827085U JPS61134882U (US06373033-20020416-M00071.png) 1985-02-12 1985-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1827085U JPS61134882U (US06373033-20020416-M00071.png) 1985-02-12 1985-02-12

Publications (1)

Publication Number Publication Date
JPS61134882U true JPS61134882U (US06373033-20020416-M00071.png) 1986-08-22

Family

ID=30506747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1827085U Pending JPS61134882U (US06373033-20020416-M00071.png) 1985-02-12 1985-02-12

Country Status (1)

Country Link
JP (1) JPS61134882U (US06373033-20020416-M00071.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013193191A (ja) * 2012-03-22 2013-09-30 Toshiba Corp 吸着装置、電子部品の製造装置、及び、電子部品の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013193191A (ja) * 2012-03-22 2013-09-30 Toshiba Corp 吸着装置、電子部品の製造装置、及び、電子部品の製造方法

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