JPS61134037U - - Google Patents

Info

Publication number
JPS61134037U
JPS61134037U JP1589785U JP1589785U JPS61134037U JP S61134037 U JPS61134037 U JP S61134037U JP 1589785 U JP1589785 U JP 1589785U JP 1589785 U JP1589785 U JP 1589785U JP S61134037 U JPS61134037 U JP S61134037U
Authority
JP
Japan
Prior art keywords
lower base
protrusions
recesses
heat treatment
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1589785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0219958Y2 (US07909887-20110322-C00021.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985015897U priority Critical patent/JPH0219958Y2/ja
Publication of JPS61134037U publication Critical patent/JPS61134037U/ja
Application granted granted Critical
Publication of JPH0219958Y2 publication Critical patent/JPH0219958Y2/ja
Expired legal-status Critical Current

Links

JP1985015897U 1985-02-08 1985-02-08 Expired JPH0219958Y2 (US07909887-20110322-C00021.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985015897U JPH0219958Y2 (US07909887-20110322-C00021.png) 1985-02-08 1985-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985015897U JPH0219958Y2 (US07909887-20110322-C00021.png) 1985-02-08 1985-02-08

Publications (2)

Publication Number Publication Date
JPS61134037U true JPS61134037U (US07909887-20110322-C00021.png) 1986-08-21
JPH0219958Y2 JPH0219958Y2 (US07909887-20110322-C00021.png) 1990-05-31

Family

ID=30502160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985015897U Expired JPH0219958Y2 (US07909887-20110322-C00021.png) 1985-02-08 1985-02-08

Country Status (1)

Country Link
JP (1) JPH0219958Y2 (US07909887-20110322-C00021.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007039106A (ja) * 2005-08-04 2007-02-15 Sii Nanotechnology Inc 弾性材料を使用した薄板状小片ホルダ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5863748U (ja) * 1981-10-22 1983-04-28 山形日本電気株式会社 プラズマ処理用ウエ−ハ装填ボ−ト

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5863748U (ja) * 1981-10-22 1983-04-28 山形日本電気株式会社 プラズマ処理用ウエ−ハ装填ボ−ト

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007039106A (ja) * 2005-08-04 2007-02-15 Sii Nanotechnology Inc 弾性材料を使用した薄板状小片ホルダ

Also Published As

Publication number Publication date
JPH0219958Y2 (US07909887-20110322-C00021.png) 1990-05-31

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