JPS61134036U - - Google Patents

Info

Publication number
JPS61134036U
JPS61134036U JP1746985U JP1746985U JPS61134036U JP S61134036 U JPS61134036 U JP S61134036U JP 1746985 U JP1746985 U JP 1746985U JP 1746985 U JP1746985 U JP 1746985U JP S61134036 U JPS61134036 U JP S61134036U
Authority
JP
Japan
Prior art keywords
microscope
measured
image
probe
display unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1746985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0225235Y2 (ar
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1746985U priority Critical patent/JPH0225235Y2/ja
Publication of JPS61134036U publication Critical patent/JPS61134036U/ja
Application granted granted Critical
Publication of JPH0225235Y2 publication Critical patent/JPH0225235Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1746985U 1985-02-08 1985-02-08 Expired JPH0225235Y2 (ar)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1746985U JPH0225235Y2 (ar) 1985-02-08 1985-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1746985U JPH0225235Y2 (ar) 1985-02-08 1985-02-08

Publications (2)

Publication Number Publication Date
JPS61134036U true JPS61134036U (ar) 1986-08-21
JPH0225235Y2 JPH0225235Y2 (ar) 1990-07-11

Family

ID=30505200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1746985U Expired JPH0225235Y2 (ar) 1985-02-08 1985-02-08

Country Status (1)

Country Link
JP (1) JPH0225235Y2 (ar)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6435928A (en) * 1987-07-30 1989-02-07 Tokyo Electron Ltd Semiconductor inspection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6435928A (en) * 1987-07-30 1989-02-07 Tokyo Electron Ltd Semiconductor inspection device

Also Published As

Publication number Publication date
JPH0225235Y2 (ar) 1990-07-11

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