JPS61133560U - - Google Patents
Info
- Publication number
- JPS61133560U JPS61133560U JP1523285U JP1523285U JPS61133560U JP S61133560 U JPS61133560 U JP S61133560U JP 1523285 U JP1523285 U JP 1523285U JP 1523285 U JP1523285 U JP 1523285U JP S61133560 U JPS61133560 U JP S61133560U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- sputter target
- vacuum container
- substrate
- target electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1523285U JPH0342037Y2 (https=) | 1985-02-04 | 1985-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1523285U JPH0342037Y2 (https=) | 1985-02-04 | 1985-02-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61133560U true JPS61133560U (https=) | 1986-08-20 |
| JPH0342037Y2 JPH0342037Y2 (https=) | 1991-09-03 |
Family
ID=30500891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1523285U Expired JPH0342037Y2 (https=) | 1985-02-04 | 1985-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342037Y2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7229715B2 (en) | 2003-06-17 | 2007-06-12 | The Gillette Company | Anode for battery |
| US7247407B2 (en) | 1997-08-01 | 2007-07-24 | The Gillette Company | Electrode having modal distribution of zinc-based particles |
| JP5651693B2 (ja) * | 2010-06-23 | 2015-01-14 | 株式会社アルバック | 基板ホルダ及び成膜装置 |
-
1985
- 1985-02-04 JP JP1523285U patent/JPH0342037Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7247407B2 (en) | 1997-08-01 | 2007-07-24 | The Gillette Company | Electrode having modal distribution of zinc-based particles |
| US7579113B2 (en) | 1997-08-01 | 2009-08-25 | The Gillette Company | Electrode having modal distribution of zinc-based particles |
| US7229715B2 (en) | 2003-06-17 | 2007-06-12 | The Gillette Company | Anode for battery |
| JP5651693B2 (ja) * | 2010-06-23 | 2015-01-14 | 株式会社アルバック | 基板ホルダ及び成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0342037Y2 (https=) | 1991-09-03 |
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