JPS61133316A - Heat treatment device - Google Patents

Abstract

PURPOSE:To increase hot air temp. and to treat quickly a work which is subjected to plasma etching by cooling a waste gas contg. a reactive gas with a low temp. gas in the stage of removing the reactive gas adsorbed to the work by hot air blowing and the heating by a heating plate. CONSTITUTION:The reactive gas such as Cl is adsorbed on the surface of the work 9 such as Al member which is subjected to the plasma etching treatment in a process for production of an IC, etc. and therefore the work is imposed on the heating plate 2 in a heating device 1, by which the work is heated; at the same time, the work 9 is heated by the hot air from nozzles 5 of a hot air generator 3 having a heater 4 to remove the reactive gas. The waste gas contains the high-temp. and corrosive Cl, etc. and therefore said gas corrodes quickly a discharge pipe 7 and subsequent installations. Part of cold air which is a source for hot air is fed to the generator 3 and is supplied in the state of the low temp. to the pipe 7 through a branch pipe 8 to cool the high-temp. waste gas in order to prevent the above-mentioned corrosion, by which the increase of the hot air temp. from the nozzles 5 is made possible and the treating capacity of the device is improved.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention is applied to a heat treatment apparatus for removing the influence of the etching gas on the workpiece after the plasma etching process due to adhesion, adsorption, etc. of the workpiece. 1
In particular, the present invention relates to a heat treatment apparatus for post-treatment of aluminum after etching.

[Prior art and its problems]

In recent years, in the manufacturing process of integrated circuits called [C],
With the increase in the degree of integration and speed of C, there is a strong demand for microfabrication of elements. For this reason, a reactive ion etching method is used that can achieve a vertical etched profile without undercuts. For example, when etching aluminum, which is often used as an electrode wiring material, a chlorine-based gas is used.The workpiece is introduced into a reaction vessel and a glow discharge is generated in the reaction gas atmosphere under reduced pressure. Etching progresses by promoting the reaction between the etching material and the reactive gas and converting the material to be etched into a volatile compound.

When this etching process is completed and the workpiece is taken out from the reaction chamber into the atmosphere, the gas components used in the reaction are attached to and adsorbed on the workpiece, and react with water vapor etc. in the atmosphere.
The workpiece starts to react with the wiring pattern formed of the material to be etched, resulting in disconnection or short-circuiting of the wiring.

For this reason, it becomes necessary to remove the reactive gas components that adhere to the workpiece during the etching process. is heated by contacting it with a heating element,
By spraying onto the workpiece, reactive gas components adhering to the workpiece are removed.

However, if the hot air generated here and the reactive gas components separated from the workpiece are directly released into the atmosphere, they may cause damage to peripheral equipment due to the heat, malfunction, corrosion due to the reactive gas components,
In addition, the hot air must be guided to the reaction gas processing device in a sealed path to prevent it from being released into the atmosphere, since this may have an adverse effect on the human body. Further, the exhaust port is kept in a reduced pressure state so that the released reaction gas components can be quickly exhausted before being re-adsorbed.

Generally, however, organic materials are used for the exhaust port and the exhaust path in order to avoid corrosion due to reaction gas components, which may cause deformation or damage due to heat. For this reason, it is difficult to obtain the optimum temperature during heat treatment, resulting in disadvantages such as the need for longer treatment times than necessary, and disadvantages such as insufficient heat treatment.

(Object of the Invention) In view of this, the present invention provides a heat treatment apparatus in which a heat treatment gas supply system is connected to an exhaust passage connected to a case so as to lower the temperature of the hot air itself introduced into the heat treatment apparatus. It was made for the purpose of

[Summary of the invention]

In order to achieve the above object, the present invention includes a workpiece heating plate and a hot air generator in a case, and the case is connected to a discharge passage for discharging gas heated in the case to the outside of the case. The heat treatment apparatus is characterized in that the discharge passage and a heat treatment gas supply system supplied to the hot air generator are connected by a pipe line.

[Embodiments of the invention]

The present invention will be described below with reference to embodiments shown in FIGS. 1 to 4. The heat treatment apparatus according to the present invention includes a case 1,
A heating plate 2 provided in a case 1, a hot air generator body 3 for heating the workpiece on the heating plate 2 from above, a heater 4 built into this body 3, and a heater 4 hanging from this body 3. A nozzle 5, a supply pipe line 6 as a heat treatment gas supply system that is supplied from outside the case 1 to the hot air generator main body 3, and an exhaust passage 7 and an exhaust passage 7 that connect the case 1 and the exhaust port. It is constituted by a gas pipe line 8 etc. connected from the outside to the inside.

The case 1 is an outer wall of the heat treatment apparatus, and has a multilayer structure for the purpose of thermal insulation, and a portion thereof is water-cooled.

The heating plate 2 is configured to place a workpiece transported into the case 1 via a transport belt (not shown) and heat it from the bottom surface.

Above the workpiece on the heating plate 2, facing the heating plate 2,
A hot air generator for heating the workpiece from above is provided, and a plurality of nozzles 5 are provided below a main body 3 that accommodates a heater 4.

A heat treatment gas is supplied to the main body 3 in which the heater 4 is housed through a supply pipe line 6. The other end of the supply pipe 6 is connected to a pressurized gas source (not shown).

The exhaust passage 7 is connected to the lower part of the case 1,
Exhaust gas generated within the case 1 is discharged from an exhaust port provided at the tip of the exhaust passage 7 and guided to the reaction gas processing device.

Further, in the exhaust passage 7, there is a gas pipe line 8 for guiding the heat treatment gas supplied to the hot air generator main body 3 and for cooling the heat-treated gas, into which the exhaust passage 7 flows. It is set prominently.

Next, the effect will be explained.

When the gas 7 on the heating plate 2 is supplied from the pressurized gas source through the supply pipe 6 into the hot air generator main body 3, it is heated by the heater 4, and the heated gas is then passed through the nozzle 5. It squirts and blows onto the workpiece 9 from above. Here, the workpiece 9 is simultaneously heated by the heating plate 2 from below and subjected to heat treatment.

The reactive gas component separated from the workpiece 9 passes through the exhaust passage 7 under reduced pressure and is guided from the exhaust port to the reactive gas processing device.

The hot air guided into the exhaust passage 7 is mixed with low-temperature gas from a gas pipe 8 protruding into the exhaust passage 7. In this case, since the flow rate and the type of gas are the same, the temperature is lowered to 2/2 of the temperature difference A and is exhausted.

As a result, the exhaust passage 7 does not become as hot as in the past, and the current material can be used satisfactorily.

In the above explanation, when introducing the heat treatment gas from the gas source into the exhaust passage, it is directly introduced from the gas source, but it may also be introduced using a branch pipe 8 as shown in FIG. .

Further, the shape of the gas pipe connected to the exhaust passage may be arbitrary, but it should be bent downward at the center of the exhaust passage as shown in 10 in Fig. 2, and in the same direction as the exhaust direction. It is conceivable to set it at a right angle or at right angles as shown in 11 in Fig. 3, but in either case, it is desirable that it does not interfere with hot air or flowing mountains.

Furthermore, in order to improve the temperature relaxation, it is effective to drill a large number of holes 13 inside the spiral vibrator 12 as shown in FIG. 4, and to blow out low-temperature gas from the holes 13.

In addition, if you want to increase the flow rate of hot air, introduce the heat treatment gas into the exhaust passage through a separate system from the supply to the hot air generator, and introduce a gas with a specific heat larger than the specific heat of the hot air into the exhaust passage. By this, the flow rate introduced into the exhaust passage becomes
The same effect can be obtained even when the flow is smaller than the flow m supplied to the hot air generator.
[Effects of the Invention] As explained above, according to the present invention, in a heat treatment apparatus using hot air, low-temperature gas for heat treatment is allowed to flow into the exhaust passage to cool the heat-treated gas exhausted from the apparatus. Because of this, it is possible to prevent the temperature rise in the exhaust passage, which makes it possible to raise the hot air temperature of the hot air generator to the required temperature.As a result, it has advantages such as reducing the defective rate of workpieces and shortening processing time. It is possible to achieve the following effects.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram of a heat treatment apparatus according to the present invention, and FIGS. 2 to 4 are explanatory diagrams of other embodiments of the gas pipe line of the present invention. DESCRIPTION OF SYMBOLS 1... Case, 2... Heating plate, 3... Hot air generator main body, 4... Heater, 5... Nozzle, 6...
Supply pipe line, 7... Exhaust passage, 8... Pipe line, 9...
work. Applicant's agent Kiyoshi Inomata Figure 1 Figure 2

Claims (1)

[Claims] 1. A heat treatment apparatus having a workpiece heating plate and a hot air generator in a case, the case being connected to a discharge passage for discharging gas heated in the case to the outside of the case, A heat treatment apparatus in which the discharge passage and a heat treatment gas supply system supplied to the hot air generator are connected by a pipe line. 2. The heat treatment apparatus according to claim 1, wherein the discharge passage and the heat treatment gas supply system supplied to the hot air generator are connected by a branch pipe.